Revisiting particle dynamics in HiPIMS discharges. I. General effects
A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on...
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| Veröffentlicht in: | Journal of applied physics 2020-07, Vol.128 (4) |
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| creator | Hnilica, Jaroslav Klein, Peter Vašina, Petr Snyders, Rony Britun, Nikolay |
| description | A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)]. |
| doi_str_mv | 10.1063/5.0009378 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_scita</sourceid><recordid>TN_cdi_proquest_journals_2427678756</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2427678756</sourcerecordid><originalsourceid>FETCH-LOGICAL-c393t-6345647ebeb161182a1f1a70f9e88dc4d8af848b543d79a94b24dffb8598cff33</originalsourceid><addsrcrecordid>eNp90EtLAzEUBeAgCtbqwn8QcKUwYzJJJslSSl9QUXysQyaT1JR2ZkzSQv-9Iy26EFzdzcc5lwPANUY5RiW5ZzlCSBIuTsAAIyEzzhg6BQOECpwJyeU5uIhxhRDGgsgBGL_YnY8--WYJOx2SN2sL632jN95E6Bs488_zx1dY-2g-dFjamMN5Dqe2sUGvoXXOmhQvwZnT62ivjncI3ifjt9EsWzxN56OHRWaIJCkrCWUl5bayFS77BwqNHdYcOWmFqA2thXaCiopRUnOpJa0KWjtXCSaFcY6QIbg55Hah_dzamNSq3Yamr1QFLXjJBWdlr24PyoQ2xmCd6oLf6LBXGKnvlRRTx5V6e3ew0fikk2-bH7xrwy9UXe3-w3-TvwCrjHRL</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2427678756</pqid></control><display><type>article</type><title>Revisiting particle dynamics in HiPIMS discharges. I. General effects</title><source>AIP Journals Complete</source><source>Alma/SFX Local Collection</source><creator>Hnilica, Jaroslav ; Klein, Peter ; Vašina, Petr ; Snyders, Rony ; Britun, Nikolay</creator><creatorcontrib>Hnilica, Jaroslav ; Klein, Peter ; Vašina, Petr ; Snyders, Rony ; Britun, Nikolay</creatorcontrib><description>A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/5.0009378</identifier><identifier>CODEN: JAPIAU</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Discharge ; Ground state ; Magnetron sputtering ; Particle density (concentration) ; Pulse repetition rate ; Two dimensional analysis</subject><ispartof>Journal of applied physics, 2020-07, Vol.128 (4)</ispartof><rights>Author(s)</rights><rights>2020 Author(s). Published under license by AIP Publishing.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c393t-6345647ebeb161182a1f1a70f9e88dc4d8af848b543d79a94b24dffb8598cff33</citedby><cites>FETCH-LOGICAL-c393t-6345647ebeb161182a1f1a70f9e88dc4d8af848b543d79a94b24dffb8598cff33</cites><orcidid>0000-0002-4995-3756 ; 0000-0003-4488-8016 ; 0000-0002-5021-2664</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/jap/article-lookup/doi/10.1063/5.0009378$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,776,780,790,4498,27901,27902,76126</link.rule.ids></links><search><creatorcontrib>Hnilica, Jaroslav</creatorcontrib><creatorcontrib>Klein, Peter</creatorcontrib><creatorcontrib>Vašina, Petr</creatorcontrib><creatorcontrib>Snyders, Rony</creatorcontrib><creatorcontrib>Britun, Nikolay</creatorcontrib><title>Revisiting particle dynamics in HiPIMS discharges. I. General effects</title><title>Journal of applied physics</title><description>A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].</description><subject>Discharge</subject><subject>Ground state</subject><subject>Magnetron sputtering</subject><subject>Particle density (concentration)</subject><subject>Pulse repetition rate</subject><subject>Two dimensional analysis</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNp90EtLAzEUBeAgCtbqwn8QcKUwYzJJJslSSl9QUXysQyaT1JR2ZkzSQv-9Iy26EFzdzcc5lwPANUY5RiW5ZzlCSBIuTsAAIyEzzhg6BQOECpwJyeU5uIhxhRDGgsgBGL_YnY8--WYJOx2SN2sL632jN95E6Bs488_zx1dY-2g-dFjamMN5Dqe2sUGvoXXOmhQvwZnT62ivjncI3ifjt9EsWzxN56OHRWaIJCkrCWUl5bayFS77BwqNHdYcOWmFqA2thXaCiopRUnOpJa0KWjtXCSaFcY6QIbg55Hah_dzamNSq3Yamr1QFLXjJBWdlr24PyoQ2xmCd6oLf6LBXGKnvlRRTx5V6e3ew0fikk2-bH7xrwy9UXe3-w3-TvwCrjHRL</recordid><startdate>20200728</startdate><enddate>20200728</enddate><creator>Hnilica, Jaroslav</creator><creator>Klein, Peter</creator><creator>Vašina, Petr</creator><creator>Snyders, Rony</creator><creator>Britun, Nikolay</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-4995-3756</orcidid><orcidid>https://orcid.org/0000-0003-4488-8016</orcidid><orcidid>https://orcid.org/0000-0002-5021-2664</orcidid></search><sort><creationdate>20200728</creationdate><title>Revisiting particle dynamics in HiPIMS discharges. I. General effects</title><author>Hnilica, Jaroslav ; Klein, Peter ; Vašina, Petr ; Snyders, Rony ; Britun, Nikolay</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c393t-6345647ebeb161182a1f1a70f9e88dc4d8af848b543d79a94b24dffb8598cff33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Discharge</topic><topic>Ground state</topic><topic>Magnetron sputtering</topic><topic>Particle density (concentration)</topic><topic>Pulse repetition rate</topic><topic>Two dimensional analysis</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hnilica, Jaroslav</creatorcontrib><creatorcontrib>Klein, Peter</creatorcontrib><creatorcontrib>Vašina, Petr</creatorcontrib><creatorcontrib>Snyders, Rony</creatorcontrib><creatorcontrib>Britun, Nikolay</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hnilica, Jaroslav</au><au>Klein, Peter</au><au>Vašina, Petr</au><au>Snyders, Rony</au><au>Britun, Nikolay</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Revisiting particle dynamics in HiPIMS discharges. I. General effects</atitle><jtitle>Journal of applied physics</jtitle><date>2020-07-28</date><risdate>2020</risdate><volume>128</volume><issue>4</issue><issn>0021-8979</issn><eissn>1089-7550</eissn><coden>JAPIAU</coden><abstract>A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0009378</doi><tpages>14</tpages><orcidid>https://orcid.org/0000-0002-4995-3756</orcidid><orcidid>https://orcid.org/0000-0003-4488-8016</orcidid><orcidid>https://orcid.org/0000-0002-5021-2664</orcidid></addata></record> |
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| source | AIP Journals Complete; Alma/SFX Local Collection |
| subjects | Discharge Ground state Magnetron sputtering Particle density (concentration) Pulse repetition rate Two dimensional analysis |
| title | Revisiting particle dynamics in HiPIMS discharges. I. General effects |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-07T01%3A32%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_scita&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Revisiting%20particle%20dynamics%20in%20HiPIMS%20discharges.%20I.%20General%20effects&rft.jtitle=Journal%20of%20applied%20physics&rft.au=Hnilica,%20Jaroslav&rft.date=2020-07-28&rft.volume=128&rft.issue=4&rft.issn=0021-8979&rft.eissn=1089-7550&rft.coden=JAPIAU&rft_id=info:doi/10.1063/5.0009378&rft_dat=%3Cproquest_scita%3E2427678756%3C/proquest_scita%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2427678756&rft_id=info:pmid/&rfr_iscdi=true |