The Investigation for Thickness-Dependent Electrical Performance on BaTiO3/BiFeO3 Bilayer Ferromagnetic Capacitors

Bilayer barium titanate (BaTiO 3 , BTO)/bismuth ferrite (BiFeO 3 , BFO) capacitive devices were fabricated and systematically analyzed from the aspects of thin-film material crystallography and electrical characterization. The tetragonal phase (T) of BTO with the reducing thickness (150 nm) was demo...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on electron devices 2020-08, Vol.67 (8), p.3417-3423
Hauptverfasser:	Lien, Chin, Hsieh, Cho-Fan, Wu, Teng-Chun, Yang, Chan-Shan, Lee, Min-Hung, Xu, Jing-Jhang, Hu, Chen-Wei, Huang, Comet, Chang, Shou-Zen, Liao, Ming-Han
Format:	Artikel
Sprache:	eng
Schlagworte:	Barium titanate (BaTiO Barium titanates BFO Bilayers Bismuth ferrite bismuth ferrite (BiFeO BTO Capacitors Charge efficiency Crystallography Electrical properties Energy storage Ferromagnetism Flux density Lead free Leakage current Leakage currents magnetron sputtering metal–insulator–metal (MIM) capacitor Monolayers Permittivity rapid thermal anneal (RTA) Sputtering Substrates Temperature measurement Thickness Thin films
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!