Numerical Analysis of Pattern Shape Deformation in UV Imprint Due to Curing Shrinkage

The accuracy of a numerical modeling method for UV imprint processes to simulate the UV resin deformation due to UV shrinkage was evaluated. Typical UV resins induce volumetric shrinkage by several percent after UV curing. The curing shrinkage deforms the pattern shape and could be a significant iss...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2020/07/01, Vol.33(2), pp.245-250
Hauptverfasser:	Onishi, Yuki, Yamashita, Ryunosuke, Amaya, Kenji, Hirai, Yoshihiko
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Curing Deformation Finite element analysis Mathematical models Model accuracy Moldings Numerical analysis Pattern analysis Patterning Resins Shrinkage Solidification Thermo-viscoelastic material Ultraviolet radiation UV curing UV imprint UV shrinkage Virtual temperature
Online-Zugang:	Volltext
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