Fabrication of Stent-Like Mesh Structures Using Synchronized Scan Rotation Lithography and Wet Etching

Stent-like complicated cylindrical structures were made with pipes of stainless-steel SUS 304 using new lithography and wet chemical etching. In the new lithography, patterns on a flat reticle were printed on a pipe coated with a resist film by synchronously scanning the reticle linearly and rotatin...

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Veröffentlicht in:Journal of Photopolymer Science and Technology 2020/07/01, Vol.33(3), pp.361-367
Hauptverfasser: Horiuchi, Toshiyuki, Ito, Kaiki, Suzuki, Yuta, Yanagida, Akira, Kobayashi, Hiroshi
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Sprache:eng
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