Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System

The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silic...

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Veröffentlicht in:	arXiv.org 2020-07
Hauptverfasser:	Jolly, Claire, Gomez, Andres, Sanchez-Fuentes, David, Cakiroglu, Dilek, Rathar, Raissa, Maurin, Nicolas, Garcia-Bermejo, Ricardo, Charlot, Benoit, Gich, Marti, Bahriz, Michael, Picas, Laura, Carretero-Genevrier, Adrian
Format:	Artikel
Sprache:	eng
Schlagworte:	Biocompatibility Frequency control Microelectromechanical systems Micromachining Nanostructure Nanotechnology Piezoelectricity Production methods Q factors Quartz Silicon Silicon substrates
Online-Zugang:	Volltext
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