Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma

The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the r...

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