Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma
The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the r...
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| Veröffentlicht in: | Inorganic materials : applied research 2020, Vol.11 (3), p.568-571 |
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| container_title | Inorganic materials : applied research |
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| creator | Eremin, S. A. Anikin, V. N. Kuznetsov, D. V. Leontiev, I. A. Kudryashov, O. Yu Levshukov, I. A. Kolesnikova, A. M. Yashnov, Yu. M. |
| description | The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the results of Raman spectroscopy, made it possible to establish that a microwave power of 3 kW results in the deposition of a diamond film with a crystallite size from 1 to 5 μm, microwave power of 4 kW causes the deposition of diamond-like carbon, and an increase in power up to 5 kW leads to the deposition of multigraphene film. |
| doi_str_mv | 10.1134/S2075113320030120 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2414430432</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2414430432</sourcerecordid><originalsourceid>FETCH-LOGICAL-c2680-d9215165d9478eed8c2ae9a00bc980d8294f055666659cd9b0222cd697692eda3</originalsourceid><addsrcrecordid>eNp1UE1LAzEQDaJgqf0B3gKeV_O53RxL0Sq0WLBVb0uaZLsp22RNti3-e1MqehCHgfl6780wAFxjdIsxZXcvBA15yihBiCJM0BnoHVsZxvz9_Cen9BIMYtygZBxzwXgP7CfBH7oa-gqOmsZ3wbdWwZnXtrJKdta7eJyNZVh5B5NLuKitg4udW8fOOPhmg4FV8Fv4Klsf4LyW0cCDTZpdbeAyFYk_syrtkXsD542MW3kFLirZRDP4jn2wfLhfjB-z6fPkaTyaZorkBcq0IJjjnGvBhoUxulBEGiERWilRIF0QwSrEeZ6MC6XFChFClM7FMBfEaEn74Oak2wb_sTOxKzd-F1xaWRKGGaOIUZJQ-IRKR8YYTFW2wW5l-CwxKo8fLv98OHHIiRMT1q1N-FX-n_QFkgJ7iQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2414430432</pqid></control><display><type>article</type><title>Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma</title><source>SpringerLink Journals</source><creator>Eremin, S. A. ; Anikin, V. N. ; Kuznetsov, D. V. ; Leontiev, I. A. ; Kudryashov, O. Yu ; Levshukov, I. A. ; Kolesnikova, A. M. ; Yashnov, Yu. M.</creator><creatorcontrib>Eremin, S. A. ; Anikin, V. N. ; Kuznetsov, D. V. ; Leontiev, I. A. ; Kudryashov, O. Yu ; Levshukov, I. A. ; Kolesnikova, A. M. ; Yashnov, Yu. M.</creatorcontrib><description>The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the results of Raman spectroscopy, made it possible to establish that a microwave power of 3 kW results in the deposition of a diamond film with a crystallite size from 1 to 5 μm, microwave power of 4 kW causes the deposition of diamond-like carbon, and an increase in power up to 5 kW leads to the deposition of multigraphene film.</description><identifier>ISSN: 2075-1133</identifier><identifier>EISSN: 2075-115X</identifier><identifier>DOI: 10.1134/S2075113320030120</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Allotropy ; Carbon ; Chemistry ; Chemistry and Materials Science ; Crystallites ; Deposition ; Diamond-like carbon films ; Industrial Chemistry/Chemical Engineering ; Inorganic Chemistry ; Materials Science ; Microwave plasmas ; Plasmochemical Methods of Production and Treatment of Materials ; Raman spectroscopy ; Tungsten ; Vapor phases ; Wire</subject><ispartof>Inorganic materials : applied research, 2020, Vol.11 (3), p.568-571</ispartof><rights>Pleiades Publishing, Ltd. 2020</rights><rights>Pleiades Publishing, Ltd. 2020.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c2680-d9215165d9478eed8c2ae9a00bc980d8294f055666659cd9b0222cd697692eda3</citedby><cites>FETCH-LOGICAL-c2680-d9215165d9478eed8c2ae9a00bc980d8294f055666659cd9b0222cd697692eda3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S2075113320030120$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S2075113320030120$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27903,27904,41467,42536,51298</link.rule.ids></links><search><creatorcontrib>Eremin, S. A.</creatorcontrib><creatorcontrib>Anikin, V. N.</creatorcontrib><creatorcontrib>Kuznetsov, D. V.</creatorcontrib><creatorcontrib>Leontiev, I. A.</creatorcontrib><creatorcontrib>Kudryashov, O. Yu</creatorcontrib><creatorcontrib>Levshukov, I. A.</creatorcontrib><creatorcontrib>Kolesnikova, A. M.</creatorcontrib><creatorcontrib>Yashnov, Yu. M.</creatorcontrib><title>Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma</title><title>Inorganic materials : applied research</title><addtitle>Inorg. Mater. Appl. Res</addtitle><description>The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the results of Raman spectroscopy, made it possible to establish that a microwave power of 3 kW results in the deposition of a diamond film with a crystallite size from 1 to 5 μm, microwave power of 4 kW causes the deposition of diamond-like carbon, and an increase in power up to 5 kW leads to the deposition of multigraphene film.</description><subject>Allotropy</subject><subject>Carbon</subject><subject>Chemistry</subject><subject>Chemistry and Materials Science</subject><subject>Crystallites</subject><subject>Deposition</subject><subject>Diamond-like carbon films</subject><subject>Industrial Chemistry/Chemical Engineering</subject><subject>Inorganic Chemistry</subject><subject>Materials Science</subject><subject>Microwave plasmas</subject><subject>Plasmochemical Methods of Production and Treatment of Materials</subject><subject>Raman spectroscopy</subject><subject>Tungsten</subject><subject>Vapor phases</subject><subject>Wire</subject><issn>2075-1133</issn><issn>2075-115X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNp1UE1LAzEQDaJgqf0B3gKeV_O53RxL0Sq0WLBVb0uaZLsp22RNti3-e1MqehCHgfl6780wAFxjdIsxZXcvBA15yihBiCJM0BnoHVsZxvz9_Cen9BIMYtygZBxzwXgP7CfBH7oa-gqOmsZ3wbdWwZnXtrJKdta7eJyNZVh5B5NLuKitg4udW8fOOPhmg4FV8Fv4Klsf4LyW0cCDTZpdbeAyFYk_syrtkXsD542MW3kFLirZRDP4jn2wfLhfjB-z6fPkaTyaZorkBcq0IJjjnGvBhoUxulBEGiERWilRIF0QwSrEeZ6MC6XFChFClM7FMBfEaEn74Oak2wb_sTOxKzd-F1xaWRKGGaOIUZJQ-IRKR8YYTFW2wW5l-CwxKo8fLv98OHHIiRMT1q1N-FX-n_QFkgJ7iQ</recordid><startdate>2020</startdate><enddate>2020</enddate><creator>Eremin, S. A.</creator><creator>Anikin, V. N.</creator><creator>Kuznetsov, D. V.</creator><creator>Leontiev, I. A.</creator><creator>Kudryashov, O. Yu</creator><creator>Levshukov, I. A.</creator><creator>Kolesnikova, A. M.</creator><creator>Yashnov, Yu. M.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>2020</creationdate><title>Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma</title><author>Eremin, S. A. ; Anikin, V. N. ; Kuznetsov, D. V. ; Leontiev, I. A. ; Kudryashov, O. Yu ; Levshukov, I. A. ; Kolesnikova, A. M. ; Yashnov, Yu. M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2680-d9215165d9478eed8c2ae9a00bc980d8294f055666659cd9b0222cd697692eda3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Allotropy</topic><topic>Carbon</topic><topic>Chemistry</topic><topic>Chemistry and Materials Science</topic><topic>Crystallites</topic><topic>Deposition</topic><topic>Diamond-like carbon films</topic><topic>Industrial Chemistry/Chemical Engineering</topic><topic>Inorganic Chemistry</topic><topic>Materials Science</topic><topic>Microwave plasmas</topic><topic>Plasmochemical Methods of Production and Treatment of Materials</topic><topic>Raman spectroscopy</topic><topic>Tungsten</topic><topic>Vapor phases</topic><topic>Wire</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Eremin, S. A.</creatorcontrib><creatorcontrib>Anikin, V. N.</creatorcontrib><creatorcontrib>Kuznetsov, D. V.</creatorcontrib><creatorcontrib>Leontiev, I. A.</creatorcontrib><creatorcontrib>Kudryashov, O. Yu</creatorcontrib><creatorcontrib>Levshukov, I. A.</creatorcontrib><creatorcontrib>Kolesnikova, A. M.</creatorcontrib><creatorcontrib>Yashnov, Yu. M.</creatorcontrib><collection>CrossRef</collection><jtitle>Inorganic materials : applied research</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Eremin, S. A.</au><au>Anikin, V. N.</au><au>Kuznetsov, D. V.</au><au>Leontiev, I. A.</au><au>Kudryashov, O. Yu</au><au>Levshukov, I. A.</au><au>Kolesnikova, A. M.</au><au>Yashnov, Yu. M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma</atitle><jtitle>Inorganic materials : applied research</jtitle><stitle>Inorg. Mater. Appl. Res</stitle><date>2020</date><risdate>2020</risdate><volume>11</volume><issue>3</issue><spage>568</spage><epage>571</epage><pages>568-571</pages><issn>2075-1133</issn><eissn>2075-115X</eissn><abstract>The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the results of Raman spectroscopy, made it possible to establish that a microwave power of 3 kW results in the deposition of a diamond film with a crystallite size from 1 to 5 μm, microwave power of 4 kW causes the deposition of diamond-like carbon, and an increase in power up to 5 kW leads to the deposition of multigraphene film.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S2075113320030120</doi><tpages>4</tpages></addata></record> |
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| subjects | Allotropy Carbon Chemistry Chemistry and Materials Science Crystallites Deposition Diamond-like carbon films Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science Microwave plasmas Plasmochemical Methods of Production and Treatment of Materials Raman spectroscopy Tungsten Vapor phases Wire |
| title | Growth of Allotropic Modifications of Carbon on a Thin Tungsten Wire from Vapor Phase with the Use of Microwave Plasma |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-23T05%3A48%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Growth%20of%20Allotropic%20Modifications%20of%20Carbon%20on%20a%20Thin%20Tungsten%20Wire%20from%20Vapor%20Phase%20with%20the%20Use%20of%20Microwave%20Plasma&rft.jtitle=Inorganic%20materials%20:%20applied%20research&rft.au=Eremin,%20S.%20A.&rft.date=2020&rft.volume=11&rft.issue=3&rft.spage=568&rft.epage=571&rft.pages=568-571&rft.issn=2075-1133&rft.eissn=2075-115X&rft_id=info:doi/10.1134/S2075113320030120&rft_dat=%3Cproquest_cross%3E2414430432%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2414430432&rft_id=info:pmid/&rfr_iscdi=true |