Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Aluminium nitride piezoelectric thin films grown on sapphire are strong candidates for high-temperature surface acoustic wave (SAW) sensors, due to their thermal stability, large bandgap, high acoustic velocity and suitable electromechanical coupling. However, thin-film resonators need more design e...

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Veröffentlicht in:IEEE sensors journal 2020-07, Vol.20 (13), p.6985-6991
Hauptverfasser: Streque, Jeremy, Camus, Julien, Laroche, Thierry, Hage-Ali, Sami, M'Jahed, Hamid, Rammal, Mohammad, Aubert, Thierry, Djouadi, Mohamed Abdou, Ballandras, Sylvain, Elmazria, Omar
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container_issue 13
container_start_page 6985
container_title IEEE sensors journal
container_volume 20
creator Streque, Jeremy
Camus, Julien
Laroche, Thierry
Hage-Ali, Sami
M'Jahed, Hamid
Rammal, Mohammad
Aubert, Thierry
Djouadi, Mohamed Abdou
Ballandras, Sylvain
Elmazria, Omar
description Aluminium nitride piezoelectric thin films grown on sapphire are strong candidates for high-temperature surface acoustic wave (SAW) sensors, due to their thermal stability, large bandgap, high acoustic velocity and suitable electromechanical coupling. However, thin-film resonators need more design efforts than those based on bulk crystals, due to the usually limited thickness of the piezoelectric films, and to acoustic properties disparities between the latters and their host substrate. This work presents an optimization of AlN/Sapphire-based SAW resonators with high quality factors for high-temperature applications. It combines specifically grown, 3~\mu \text{m} -thick aluminium nitride films, with the use of aluminium electrodes for their low density and resistivity, as an alternative to heavier electrodes like Pt. These electrodes allow for much lower mechanical losses and higher quality factors, in spite of needing passivation for increased lifetime. A standard resonator design is first presented and used for preliminary tests, in order to monitor the AlN/Sapphire structure with unprotected aluminium electrodes, for temperatures up to 600°C. A quasi-synchronous, optimized design is then proposed for higher quality factors and wireless sensing compliance. The high temperature characterizations confirmed that much larger quality factors can be retrieved from this optimized design. The quasi-synchronous resonators proposed in this study remain well-tuned for temperatures up to 400°C, and show high quality factors, as high as 3400 at 400°C.
doi_str_mv 10.1109/JSEN.2020.2978179
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However, thin-film resonators need more design efforts than those based on bulk crystals, due to the usually limited thickness of the piezoelectric films, and to acoustic properties disparities between the latters and their host substrate. This work presents an optimization of AlN/Sapphire-based SAW resonators with high quality factors for high-temperature applications. It combines specifically grown, &lt;inline-formula&gt; &lt;tex-math notation="LaTeX"&gt;3~\mu \text{m} &lt;/tex-math&gt;&lt;/inline-formula&gt;-thick aluminium nitride films, with the use of aluminium electrodes for their low density and resistivity, as an alternative to heavier electrodes like Pt. These electrodes allow for much lower mechanical losses and higher quality factors, in spite of needing passivation for increased lifetime. A standard resonator design is first presented and used for preliminary tests, in order to monitor the AlN/Sapphire structure with unprotected aluminium electrodes, for temperatures up to 600°C. A quasi-synchronous, optimized design is then proposed for higher quality factors and wireless sensing compliance. The high temperature characterizations confirmed that much larger quality factors can be retrieved from this optimized design. 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subjects Acoustic properties
Acoustic velocity
Acoustics
aluminium nitride
Aluminum nitride
Design optimization
Design standards
Electrodes
Engineering Sciences
High temperature
III-V semiconductor materials
Micro and nanotechnologies
Microelectronics
Piezoelectric films
Piezoelectricity
Q factors
Q-factor
Quality
Resonators
Sapphire
Sensors
Substrates
Surface acoustic wave devices
Surface acoustic waves
Temperature
Thermal stability
Thick films
Thickness
Thin films
title Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications
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