PSD Integrated Calibration Method Based on Annunciator in Vacuum Environment

In this paper, an integrated calibration method for position sensitive detector (PSD) of moving support mechanism in vacuum plasma environment is proposed. That is, the PSD is used to track the laser spot to restore the coordinate information of the signal. Firstly, a PSD integrated calibration prin...

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Veröffentlicht in:	International journal of precision engineering and manufacturing 2020-06, Vol.21 (6), p.1153-1161
Hauptverfasser:	Wang, Demin, Jiang, Junxia, Wang, Chen, Wang, Jinghua, Bie, Lei, Zheng, Yu
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Annunciators Back propagation Calibration Computer simulation Convergence Declination Engineering Error correction Industrial and Production Engineering Materials Science Neural networks Position errors Position sensing Short Communication
Online-Zugang:	Volltext
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