Thermal stability investigation for Ohmic contact properties of Pt, Au, and Pd electrodes on the same hydrogen-terminated diamond

Here, thermal stabilities for Ohmic contact properties of Pt, Au, and Pd on the same hydrogen-terminated diamond (H-diamond) epitaxial layer are investigated. A long-term annealing process is performed with an annealing temperature and time of 400 °C and 8 h, respectively. Before annealing, good Ohm...

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Veröffentlicht in:	AIP advances 2020-05, Vol.10 (5), p.055114-055114-6
Hauptverfasser:	Yuan, Xiaolu, Liu, Jiangwei, Shao, Siwu, Liu, Jinlong, Wei, Junjun, Da, Bo, Li, Chengming, Koide, Yasuo
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Contact resistance Diamonds Electronic devices Gold High temperature Palladium Platinum Properties (attributes) Thermal stability
Online-Zugang:	Volltext
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