On the Pulsed-Laser Deposition of Bismuth-Telluride Thin Films on Polyimide Substrates

The peculiarities of obtaining p -Bi 0.5 Sb 1.5 Te 3 and n -Bi 2 Te 2.7 Se 0.3 thin thermoelectric films with a thickness of about 300 nm grown on a polyimide substrate by the pulsed-laser-deposition method are reported. The influence of the growth temperature, pressure and target-to-substrate dista...

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Veröffentlicht in:Semiconductors (Woodbury, N.Y.) N.Y.), 2020-03, Vol.54 (3), p.378-382, Article 378
Hauptverfasser: Shupenev, A. E., Korshunov, I. S., Grigoryants, A. G.
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container_issue 3
container_start_page 378
container_title Semiconductors (Woodbury, N.Y.)
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creator Shupenev, A. E.
Korshunov, I. S.
Grigoryants, A. G.
description The peculiarities of obtaining p -Bi 0.5 Sb 1.5 Te 3 and n -Bi 2 Te 2.7 Se 0.3 thin thermoelectric films with a thickness of about 300 nm grown on a polyimide substrate by the pulsed-laser-deposition method are reported. The influence of the growth temperature, pressure and target-to-substrate distance on the film’s thermoelectric properties is investigated. Thermoelectric p - and n -type films exhibit a high Seebeck coefficient of 220 and –200 μV/K and low electrical power factors of 9.7 and 5.0 μW/(cm K 2 ) respectively due to the relatively high electrical resistances of the films.
doi_str_mv 10.1134/S1063782620030173
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subjects Bismuth
Dielectric films
Electric properties
Electrical conductivity
Fabrication
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
Pulsed laser deposition
Pulsed lasers
Seebeck effect
Substrates
Testing of Materials and Structures
Thermoelectricity
Thickness
Thin films
Treatment
title On the Pulsed-Laser Deposition of Bismuth-Telluride Thin Films on Polyimide Substrates
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