Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium
A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral s...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2020-05, Vol.59 (SH), p.SHHB05 |
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| container_issue | SH |
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| container_title | Japanese Journal of Applied Physics |
| container_volume | 59 |
| creator | Tsukamoto, Keizo Tamura, Tetsuro Matsusaki, Hiromi Tona, Masahide Yamamoto, Hiroaki Nakagomi, Yuki Nishida, Hiroshi Hirai, Yoshihiro Nishimiya, Nobuo Sanekata, Masaomi Ohshimo, Keijiro Koyasu, Kiichirou Misaizu, Fuminori |
| description | A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS. |
| doi_str_mv | 10.35848/1347-4065/ab71de |
| format | Article |
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This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS.</description><subject>Diagnostic systems</subject><subject>Light emission</subject><subject>Magnetron sputtering</subject><subject>Mass spectrometry</subject><subject>Optical emission spectroscopy</subject><subject>Photoionization</subject><subject>Plasma</subject><subject>Ultraviolet lasers</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNo9kE1LAzEQhoMoWKs_wFvA89pks9nsHqX4BQUv9Ryym0mb0k3WJIvo1T9u2oqnYYbnfQcehG4puWe8qZoFZZUoKlLzheoE1XCGZv-nczQjpKRF1ZblJbqKcZfXmld0hn7WdoDCm8Ls7Wab8KBixHGEPgU_QAq2x9qqjfMx2T5i4wO23tlv0Fg5jR1MKaj9MWEhYuvwNvcUo_-EgMdpHzM45Hyu8i5jU0oQrNtgb3CySTk7DdfowqhM3vzNOXp_elwvX4rV2_Pr8mFV9Iy1qdCq7akmJYMGhCAcWNsJ0gKlraKdVh0IbWqtiCamVrwuWy0op4wAE6I2jM3R3al3DP5jgpjkzk_B5ZeyZE1JeEu5yBQ9UX3wMQYwcgx2UOFLUiKPruVBrDyIlSfX7Bf1rXX8</recordid><startdate>20200501</startdate><enddate>20200501</enddate><creator>Tsukamoto, Keizo</creator><creator>Tamura, Tetsuro</creator><creator>Matsusaki, Hiromi</creator><creator>Tona, Masahide</creator><creator>Yamamoto, Hiroaki</creator><creator>Nakagomi, Yuki</creator><creator>Nishida, Hiroshi</creator><creator>Hirai, Yoshihiro</creator><creator>Nishimiya, Nobuo</creator><creator>Sanekata, Masaomi</creator><creator>Ohshimo, Keijiro</creator><creator>Koyasu, Kiichirou</creator><creator>Misaizu, Fuminori</creator><general>Japanese Journal of Applied Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-2397-6896</orcidid><orcidid>https://orcid.org/0000-0003-0822-6285</orcidid></search><sort><creationdate>20200501</creationdate><title>Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium</title><author>Tsukamoto, Keizo ; Tamura, Tetsuro ; Matsusaki, Hiromi ; Tona, Masahide ; Yamamoto, Hiroaki ; Nakagomi, Yuki ; Nishida, Hiroshi ; Hirai, Yoshihiro ; Nishimiya, Nobuo ; Sanekata, Masaomi ; Ohshimo, Keijiro ; Koyasu, Kiichirou ; Misaizu, Fuminori</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c339t-da9c1d023e8e7705e39b709e119a1bdabe7df6da0d0f6a5629d715130e3776f33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Diagnostic systems</topic><topic>Light emission</topic><topic>Magnetron sputtering</topic><topic>Mass spectrometry</topic><topic>Optical emission spectroscopy</topic><topic>Photoionization</topic><topic>Plasma</topic><topic>Ultraviolet lasers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Tsukamoto, Keizo</creatorcontrib><creatorcontrib>Tamura, Tetsuro</creatorcontrib><creatorcontrib>Matsusaki, Hiromi</creatorcontrib><creatorcontrib>Tona, Masahide</creatorcontrib><creatorcontrib>Yamamoto, Hiroaki</creatorcontrib><creatorcontrib>Nakagomi, Yuki</creatorcontrib><creatorcontrib>Nishida, Hiroshi</creatorcontrib><creatorcontrib>Hirai, Yoshihiro</creatorcontrib><creatorcontrib>Nishimiya, Nobuo</creatorcontrib><creatorcontrib>Sanekata, Masaomi</creatorcontrib><creatorcontrib>Ohshimo, Keijiro</creatorcontrib><creatorcontrib>Koyasu, Kiichirou</creatorcontrib><creatorcontrib>Misaizu, Fuminori</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tsukamoto, Keizo</au><au>Tamura, Tetsuro</au><au>Matsusaki, Hiromi</au><au>Tona, Masahide</au><au>Yamamoto, Hiroaki</au><au>Nakagomi, Yuki</au><au>Nishida, Hiroshi</au><au>Hirai, Yoshihiro</au><au>Nishimiya, Nobuo</au><au>Sanekata, Masaomi</au><au>Ohshimo, Keijiro</au><au>Koyasu, Kiichirou</au><au>Misaizu, Fuminori</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>2020-05-01</date><risdate>2020</risdate><volume>59</volume><issue>SH</issue><spage>SHHB05</spage><pages>SHHB05-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><abstract>A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS.</abstract><cop>Tokyo</cop><pub>Japanese Journal of Applied Physics</pub><doi>10.35848/1347-4065/ab71de</doi><orcidid>https://orcid.org/0000-0002-2397-6896</orcidid><orcidid>https://orcid.org/0000-0003-0822-6285</orcidid></addata></record> |
| fulltext | fulltext |
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| ispartof | Japanese Journal of Applied Physics, 2020-05, Vol.59 (SH), p.SHHB05 |
| issn | 0021-4922 1347-4065 |
| language | eng |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Diagnostic systems Light emission Magnetron sputtering Mass spectrometry Optical emission spectroscopy Photoionization Plasma Ultraviolet lasers |
| title | Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium |
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