Properties of sputtered BaSi2 thin films annealed in vacuum condition

As a potential absorber candidate for high-efficient solar cell applications, BaSi2 films are confronted with issues of surface oxidation associated with the high-temperature annealing. Herein, BaSi2 films are deposited by the sputtering technique. A vacuum annealing process is subsequently carried...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2020-04, Vol.59, p.1
Hauptverfasser:	Tian, Yilei, Montes, Ana Rita, Vančo, Ľubomír, Isabella, Olindo, Zeman, Miro
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Barium compounds Disilicides Electrical properties High temperature Low pressure Optical properties Oxidation Photovoltaic cells Raman spectroscopy Solar cells Spectrum analysis Thin films Vacuum annealing
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