Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 112¯0 thin films

Non-polar a-plane Al0.77Sc0.23N 112¯0 thin films were prepared by magnetron sputter epitaxy on r-plane Al2O3(11¯02) substrates. Different substrate off-cut angles were compared, and the off-cut angle of 3° resulted in the best structural quality of the AlScN layer. Structural characterization by x-r...

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Veröffentlicht in:	Applied physics letters 2020-03, Vol.116 (10)
Hauptverfasser:	Ding Anli, Kirste Lutz, Lu, Yuan, Driad Rachid, Kurz, Nicolas, Lebedev Vadim, Christoph, Tim, Feil, Niclas M, Lozar, Roger, Metzger, Thomas, Žukauskaitė Agnė
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum oxide Applied physics Coupling Resonators Structural analysis Substrates Surface acoustic wave devices Surface acoustic waves Thin films Wurtzite
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