Development of a new kind low frequency low-noise vector sensor

[Display omitted] •A new kind low frequency low-noise vector sensor composed with a built-in accelerometer and a JFET-based preamplifier was developed.•A novel structure of accelerometer with cross-ring beam was proposed using relaxor-based ferroelectric crystals.•The self-noise of vector sensor was...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2020-01, Vol.301, p.111743, Article 111743
Hauptverfasser: Li, Zhi, Yang, Shi’e, Wang, Sanhong, Xu, Zhuo, Zhang, Qiang
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Sprache:eng
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