Selective laser ablation and patterning on Ag thin films with width and depth control

Silver (Ag) films were deposited on glass substrates by radio frequency (RF) magnetron sputtering and then ablated by a 532 nm nanosecond pulsed laser. The effects of laser fluence and defocusing amount on the width and depth of laser-ablated grooves on 100- and 600-nm-thick Ag films were systematic...

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Veröffentlicht in:Journal of materials science. Materials in electronics 2020-03, Vol.31 (6), p.4943-4955
Hauptverfasser: Huang, Li-jing, Zhang, Gao-ming, Li, Huang, Li, Bao-jia, Wang, Yong-ying, Ren, Nai-fei
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Sprache:eng
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