Comparison of the adhesion forces in single and double‐layer coatings on the MEMS surfaces by JKR and DMT models

In many medical and industrial applications, some strategies are needed to control the adhesion forces between the materials, because surface forces can activate or hinder the function of the device. All actual surfaces present some levels of roughness and the contact between two surfaces is transfe...

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Veröffentlicht in:	Surface and interface analysis 2020-01, Vol.52 (1-2), p.34-41
Hauptverfasser:	Joulaei, Mahdi, Kolahdoozan, Mojtaba, Salehi, Mehdi, Zadsar, Mehdi, Vahabi, Meisam
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion adhesion forces Computer simulation double‐layer coatings Evaporation Gold Industrial applications JKR and DMT models MEMS surfaces Microelectromechanical systems Protective coatings Silicon substrates Titanium dioxide
Online-Zugang:	Volltext
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