On the Change in the Reflectance of Мо(111) Mirrors after Exposure to D2–N2 Plasma
The effect of D 2 –N 2 glow discharge plasma on the reflectivity of single-crystal Mo(111) mirrors is studied. The surface of each mirror is processed by mechanical polishing with diamond pastes to a roughness of h q = 5 nm. During polishing, abrasive particles are embedded in the surface layer of t...
Gespeichert in:
| Veröffentlicht in: | Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2019-11, Vol.13 (6), p.1045-1053 |
|---|---|
| Hauptverfasser: | , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1053 |
|---|---|
| container_issue | 6 |
| container_start_page | 1045 |
| container_title | Surface investigation, x-ray, synchrotron and neutron techniques |
| container_volume | 13 |
| creator | Gorodetsky, A. E. Bukhovets, V. L. Markin, A. V. Voytitsky, V. L. Rybkina, T. V. Zalavutdinov, R. Kh Zakharov, A. P. Zolotarevsky, V. I. Arkhipushkin, I. A. Kazansky, L. P. |
| description | The effect of D
2
–N
2
glow discharge plasma on the reflectivity of single-crystal Mo(111) mirrors is studied. The surface of each mirror is processed by mechanical polishing with diamond pastes to a roughness of
h
q
= 5 nm. During polishing, abrasive particles are embedded in the surface layer of the mirror. Exposure to an ion fluence of 1.4 × 10
24
m
–2
leads to an increase in
h
q
= 7 nm. After irradiation and the removal of a 30 nm-thick Mo layer the total reflection coefficient
R
t
in a 400–1000 nm region increases by 5–10% to a steady-state value (56–58)%. The increase in
R
t
may be caused by the preferential removal of carbon during the ion-sputtering process. |
| doi_str_mv | 10.1134/S1027451019060077 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2330071948</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2330071948</sourcerecordid><originalsourceid>FETCH-LOGICAL-c2317-cefe387ab75859380078ea1fdcb7f27cfd743f213b580d3b47c662823a5ba7a43</originalsourceid><addsrcrecordid>eNp1UDlOAzEUtRBIhMAB6CzRQDHg72XsKVEIixQWsbUjj2OTRMk42BMJOu5Ay1k4Q87ASXA0SBSI6v-vt309hHaBHAIwfnQHhEougEBBckKkXEMdUFBkkhR8Pe0Jzlb4JtqKcUKIkEzkHfR4XeNmZHFvpOsni8ftdWvd1JpG18Zi7_DyY_m5DwAH-HIcgg8Ra9fYgPsvcx8XweLG4xP69fZ-RfHNVMeZ3kYbTk-j3fmZXfRw2r_vnWeD67OL3vEgM5SBzIx1limpKymUKJhKjyurwQ1NJR2Vxg0lZ44Cq4QiQ1ZxafKcKsq0qLTUnHXRXus7D_55YWNTTvwi1CmypIwlOyi4SixoWSb4GIN15TyMZzq8lkDKVX3ln_qShraamLipmvDr_L_oG_rpcIc</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2330071948</pqid></control><display><type>article</type><title>On the Change in the Reflectance of Мо(111) Mirrors after Exposure to D2–N2 Plasma</title><source>Springer Nature - Complete Springer Journals</source><creator>Gorodetsky, A. E. ; Bukhovets, V. L. ; Markin, A. V. ; Voytitsky, V. L. ; Rybkina, T. V. ; Zalavutdinov, R. Kh ; Zakharov, A. P. ; Zolotarevsky, V. I. ; Arkhipushkin, I. A. ; Kazansky, L. P.</creator><creatorcontrib>Gorodetsky, A. E. ; Bukhovets, V. L. ; Markin, A. V. ; Voytitsky, V. L. ; Rybkina, T. V. ; Zalavutdinov, R. Kh ; Zakharov, A. P. ; Zolotarevsky, V. I. ; Arkhipushkin, I. A. ; Kazansky, L. P.</creatorcontrib><description>The effect of D
2
–N
2
glow discharge plasma on the reflectivity of single-crystal Mo(111) mirrors is studied. The surface of each mirror is processed by mechanical polishing with diamond pastes to a roughness of
h
q
= 5 nm. During polishing, abrasive particles are embedded in the surface layer of the mirror. Exposure to an ion fluence of 1.4 × 10
24
m
–2
leads to an increase in
h
q
= 7 nm. After irradiation and the removal of a 30 nm-thick Mo layer the total reflection coefficient
R
t
in a 400–1000 nm region increases by 5–10% to a steady-state value (56–58)%. The increase in
R
t
may be caused by the preferential removal of carbon during the ion-sputtering process.</description><identifier>ISSN: 1027-4510</identifier><identifier>EISSN: 1819-7094</identifier><identifier>DOI: 10.1134/S1027451019060077</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Chemistry and Materials Science ; Diamond polishing ; Diamonds ; Fluence ; Glow discharges ; Materials Science ; Mechanical polishing ; Nitrogen plasma ; Pastes ; Reflectance ; Single crystals ; Surface layers ; Surfaces and Interfaces ; Thin Films</subject><ispartof>Surface investigation, x-ray, synchrotron and neutron techniques, 2019-11, Vol.13 (6), p.1045-1053</ispartof><rights>Pleiades Publishing, Ltd. 2019</rights><rights>Copyright Springer Nature B.V. 2019</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c2317-cefe387ab75859380078ea1fdcb7f27cfd743f213b580d3b47c662823a5ba7a43</citedby><cites>FETCH-LOGICAL-c2317-cefe387ab75859380078ea1fdcb7f27cfd743f213b580d3b47c662823a5ba7a43</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1027451019060077$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1027451019060077$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids></links><search><creatorcontrib>Gorodetsky, A. E.</creatorcontrib><creatorcontrib>Bukhovets, V. L.</creatorcontrib><creatorcontrib>Markin, A. V.</creatorcontrib><creatorcontrib>Voytitsky, V. L.</creatorcontrib><creatorcontrib>Rybkina, T. V.</creatorcontrib><creatorcontrib>Zalavutdinov, R. Kh</creatorcontrib><creatorcontrib>Zakharov, A. P.</creatorcontrib><creatorcontrib>Zolotarevsky, V. I.</creatorcontrib><creatorcontrib>Arkhipushkin, I. A.</creatorcontrib><creatorcontrib>Kazansky, L. P.</creatorcontrib><title>On the Change in the Reflectance of Мо(111) Mirrors after Exposure to D2–N2 Plasma</title><title>Surface investigation, x-ray, synchrotron and neutron techniques</title><addtitle>J. Synch. Investig</addtitle><description>The effect of D
2
–N
2
glow discharge plasma on the reflectivity of single-crystal Mo(111) mirrors is studied. The surface of each mirror is processed by mechanical polishing with diamond pastes to a roughness of
h
q
= 5 nm. During polishing, abrasive particles are embedded in the surface layer of the mirror. Exposure to an ion fluence of 1.4 × 10
24
m
–2
leads to an increase in
h
q
= 7 nm. After irradiation and the removal of a 30 nm-thick Mo layer the total reflection coefficient
R
t
in a 400–1000 nm region increases by 5–10% to a steady-state value (56–58)%. The increase in
R
t
may be caused by the preferential removal of carbon during the ion-sputtering process.</description><subject>Chemistry and Materials Science</subject><subject>Diamond polishing</subject><subject>Diamonds</subject><subject>Fluence</subject><subject>Glow discharges</subject><subject>Materials Science</subject><subject>Mechanical polishing</subject><subject>Nitrogen plasma</subject><subject>Pastes</subject><subject>Reflectance</subject><subject>Single crystals</subject><subject>Surface layers</subject><subject>Surfaces and Interfaces</subject><subject>Thin Films</subject><issn>1027-4510</issn><issn>1819-7094</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNp1UDlOAzEUtRBIhMAB6CzRQDHg72XsKVEIixQWsbUjj2OTRMk42BMJOu5Ay1k4Q87ASXA0SBSI6v-vt309hHaBHAIwfnQHhEougEBBckKkXEMdUFBkkhR8Pe0Jzlb4JtqKcUKIkEzkHfR4XeNmZHFvpOsni8ftdWvd1JpG18Zi7_DyY_m5DwAH-HIcgg8Ra9fYgPsvcx8XweLG4xP69fZ-RfHNVMeZ3kYbTk-j3fmZXfRw2r_vnWeD67OL3vEgM5SBzIx1limpKymUKJhKjyurwQ1NJR2Vxg0lZ44Cq4QiQ1ZxafKcKsq0qLTUnHXRXus7D_55YWNTTvwi1CmypIwlOyi4SixoWSb4GIN15TyMZzq8lkDKVX3ln_qShraamLipmvDr_L_oG_rpcIc</recordid><startdate>20191101</startdate><enddate>20191101</enddate><creator>Gorodetsky, A. E.</creator><creator>Bukhovets, V. L.</creator><creator>Markin, A. V.</creator><creator>Voytitsky, V. L.</creator><creator>Rybkina, T. V.</creator><creator>Zalavutdinov, R. Kh</creator><creator>Zakharov, A. P.</creator><creator>Zolotarevsky, V. I.</creator><creator>Arkhipushkin, I. A.</creator><creator>Kazansky, L. P.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20191101</creationdate><title>On the Change in the Reflectance of Мо(111) Mirrors after Exposure to D2–N2 Plasma</title><author>Gorodetsky, A. E. ; Bukhovets, V. L. ; Markin, A. V. ; Voytitsky, V. L. ; Rybkina, T. V. ; Zalavutdinov, R. Kh ; Zakharov, A. P. ; Zolotarevsky, V. I. ; Arkhipushkin, I. A. ; Kazansky, L. P.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2317-cefe387ab75859380078ea1fdcb7f27cfd743f213b580d3b47c662823a5ba7a43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>Chemistry and Materials Science</topic><topic>Diamond polishing</topic><topic>Diamonds</topic><topic>Fluence</topic><topic>Glow discharges</topic><topic>Materials Science</topic><topic>Mechanical polishing</topic><topic>Nitrogen plasma</topic><topic>Pastes</topic><topic>Reflectance</topic><topic>Single crystals</topic><topic>Surface layers</topic><topic>Surfaces and Interfaces</topic><topic>Thin Films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gorodetsky, A. E.</creatorcontrib><creatorcontrib>Bukhovets, V. L.</creatorcontrib><creatorcontrib>Markin, A. V.</creatorcontrib><creatorcontrib>Voytitsky, V. L.</creatorcontrib><creatorcontrib>Rybkina, T. V.</creatorcontrib><creatorcontrib>Zalavutdinov, R. Kh</creatorcontrib><creatorcontrib>Zakharov, A. P.</creatorcontrib><creatorcontrib>Zolotarevsky, V. I.</creatorcontrib><creatorcontrib>Arkhipushkin, I. A.</creatorcontrib><creatorcontrib>Kazansky, L. P.</creatorcontrib><collection>CrossRef</collection><jtitle>Surface investigation, x-ray, synchrotron and neutron techniques</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gorodetsky, A. E.</au><au>Bukhovets, V. L.</au><au>Markin, A. V.</au><au>Voytitsky, V. L.</au><au>Rybkina, T. V.</au><au>Zalavutdinov, R. Kh</au><au>Zakharov, A. P.</au><au>Zolotarevsky, V. I.</au><au>Arkhipushkin, I. A.</au><au>Kazansky, L. P.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On the Change in the Reflectance of Мо(111) Mirrors after Exposure to D2–N2 Plasma</atitle><jtitle>Surface investigation, x-ray, synchrotron and neutron techniques</jtitle><stitle>J. Synch. Investig</stitle><date>2019-11-01</date><risdate>2019</risdate><volume>13</volume><issue>6</issue><spage>1045</spage><epage>1053</epage><pages>1045-1053</pages><issn>1027-4510</issn><eissn>1819-7094</eissn><abstract>The effect of D
2
–N
2
glow discharge plasma on the reflectivity of single-crystal Mo(111) mirrors is studied. The surface of each mirror is processed by mechanical polishing with diamond pastes to a roughness of
h
q
= 5 nm. During polishing, abrasive particles are embedded in the surface layer of the mirror. Exposure to an ion fluence of 1.4 × 10
24
m
–2
leads to an increase in
h
q
= 7 nm. After irradiation and the removal of a 30 nm-thick Mo layer the total reflection coefficient
R
t
in a 400–1000 nm region increases by 5–10% to a steady-state value (56–58)%. The increase in
R
t
may be caused by the preferential removal of carbon during the ion-sputtering process.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1027451019060077</doi><tpages>9</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1027-4510 |
| ispartof | Surface investigation, x-ray, synchrotron and neutron techniques, 2019-11, Vol.13 (6), p.1045-1053 |
| issn | 1027-4510 1819-7094 |
| language | eng |
| recordid | cdi_proquest_journals_2330071948 |
| source | Springer Nature - Complete Springer Journals |
| subjects | Chemistry and Materials Science Diamond polishing Diamonds Fluence Glow discharges Materials Science Mechanical polishing Nitrogen plasma Pastes Reflectance Single crystals Surface layers Surfaces and Interfaces Thin Films |
| title | On the Change in the Reflectance of Мо(111) Mirrors after Exposure to D2–N2 Plasma |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-21T19%3A53%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=On%20the%20Change%20in%20the%20Reflectance%20of%20%D0%9C%D0%BE(111)%20Mirrors%20after%20Exposure%20to%20D2%E2%80%93N2%20Plasma&rft.jtitle=Surface%20investigation,%20x-ray,%20synchrotron%20and%20neutron%20techniques&rft.au=Gorodetsky,%20A.%20E.&rft.date=2019-11-01&rft.volume=13&rft.issue=6&rft.spage=1045&rft.epage=1053&rft.pages=1045-1053&rft.issn=1027-4510&rft.eissn=1819-7094&rft_id=info:doi/10.1134/S1027451019060077&rft_dat=%3Cproquest_cross%3E2330071948%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2330071948&rft_id=info:pmid/&rfr_iscdi=true |