Effect of Target Erosion on Properties of Molybdenum Films

The influence exerted by the profile of the zone in which the target is sputtered on the structure and properties of molybdenum films produced by magnetron sputtering with the discharge stabilized in its current and power was examined. It was shown that the resulting films have a (110) texture and c...

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Veröffentlicht in:	Russian journal of applied chemistry 2019-10, Vol.92 (10), p.1359-1365
Hauptverfasser:	Minkin, A. M., Medvedeva, N. A., Larionov, D. D., Ketov, A. A., Vaisman, Ya. I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Anodic dissolution Chemistry Chemistry and Materials Science Chemistry/Food Science Dissolution Erosion Industrial Chemistry/Chemical Engineering Inorganic Synthesis and Industrial Inorganic Chemistry Magnetic properties Magnetron sputtering Microstructure Molybdenum Thickness
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