Polyatomic degrees of freedom and their temporal evolution extracted from the damping of micro-oscillators

•The effect of activated rotational and vibrational DOF on the damping is investigated.•Q factor measurement for various gap widths over a wide pressure range are presented.•DOF activation process for polyatomic gases with μs resolution is observed.•Relaxation times and collision numbers are determi...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2019-10, Vol.297, p.111460, Article 111460
Hauptverfasser:	Zengerle, T., Joppich, J., Schwarz, P., Ababneh, A., Seidel, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Collision number Damping Degrees of freedom Influence MEMS oscillator Molecular flow Oscillators Polyatomic gases Pressure dependence Q factor Q factors Rare gases Relaxation time Rotational and vibrational degrees of freedom Studies Thermodynamics
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