Resonant Raman scattering characterization of thermally annealed HiPIMS deposited MoSx coatings

Raman spectroscopy is used to investigate the structural and tribological properties of HiPIMS sputtered MoSx thin films which were post-growth-annealed at different temperatures. The Raman scattering combined with X-ray diffraction determines a reduction in the residual strain within the MoSx layer...

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Veröffentlicht in:	Surface & coatings technology 2019-11, Vol.377, p.1, Article 124891
Hauptverfasser:	Moldenhauer, Henning, Wittig, Alexandra, Kokalj, David, Stangier, Dominic, Brümmer, Andreas, Tillmann, Wolfgang, Debus, Jörg
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Ball-on-disc Coatings Coefficient of friction Excitons Fault detection High temperature HiPIMS MoSx Raman spectra Raman spectroscopy Shear forces Shear strength Sputtered coatings Stacking faults Substrates Thin films Tribology Vacuum annealing
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