Substrate temperature effect on microstructure, oxygen adsorption and ethanol sensing response of sprayed In2S3 films

This paper reports the effect of the substrate temperature of sprayed In 2 S 3 material on the sensing response to ethanol. Glass substrates have been the supports of In 2 S 3 thin films elaborated by spray pyrolysis technique. The growth has been made at a substrate temperature in the range 300–500 °C and the S/In molar ratio was set to 2. The morphology and microstructure of the obtained layers were depicted by X-ray diffraction (XRD), energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM) and Raman spectroscopy. Ethanol vapor dynamic response was evaluated at a working temperature ranging from 250 to 400 °C by DC electrical characterization. The best response towards ethanol is obtained for the film deposited at 380 °C substrate temperature. Moreover, the oxygen adsorption heats of films were also evaluated.