Influence of Zr Doping on the Tribological Properties of Amorphous Carbon-Nitride Coating
This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and o...
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| Veröffentlicht in: | Key engineering materials 2019-09, Vol.823, p.9-14 |
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| creator | Wu, Huang Ming Yao, Sun Hui Su, Yen Liang Lai, Yu Chen |
| description | This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nanohardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nanohardness was increased and the wear performance was largely improved. |
| doi_str_mv | 10.4028/www.scientific.net/KEM.823.9 |
| format | Article |
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The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nanohardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nanohardness was increased and the wear performance was largely improved.</description><identifier>ISSN: 1013-9826</identifier><identifier>ISSN: 1662-9795</identifier><identifier>EISSN: 1662-9795</identifier><identifier>DOI: 10.4028/www.scientific.net/KEM.823.9</identifier><language>eng</language><publisher>Zurich: Trans Tech Publications Ltd</publisher><subject>Carbon nitride ; Coatings ; Doping ; Magnetron sputtering ; Metallic glasses ; Nanohardness ; Profilometers ; Tribology ; Unbalance ; Wear ; X ray photoelectron spectroscopy ; Zirconium carbide</subject><ispartof>Key engineering materials, 2019-09, Vol.823, p.9-14</ispartof><rights>2019 Trans Tech Publications Ltd</rights><rights>Copyright Trans Tech Publications Ltd. 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The nanohardness was increased and the wear performance was largely improved.</description><subject>Carbon nitride</subject><subject>Coatings</subject><subject>Doping</subject><subject>Magnetron sputtering</subject><subject>Metallic glasses</subject><subject>Nanohardness</subject><subject>Profilometers</subject><subject>Tribology</subject><subject>Unbalance</subject><subject>Wear</subject><subject>X ray photoelectron spectroscopy</subject><subject>Zirconium carbide</subject><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><sourceid>AFKRA</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNqNkMtKAzEUhgdRsFbfIaDbmSaZmTQBEUqtWqyXRV3oJmQySZvSJmOSUnx7Uyp06-b8Z_Ff4MuyGwSLCmI62O12RZBG2Wi0kYVVcfA8eSkoLgt2kvUQIThnQ1afph-iMmcUk_PsIoQVhCWiqO5ln1Or11tlpQJOgy8P7l1n7AI4C-JSgbk3jVu7hZFiDd6965SPRoW9d7Rxvlu6bQBj4Rtn81cTvWkVGDsRU8VldqbFOqirP-1nHw-T-fgpn709TsejWS4xJCynWGiIW0EEairCKiIFgpTQBlatgFS2uKlwSWVDaN3UQjOkG8xgWwuhkapx2c-uD72dd99bFSJfua23aZLjEsIhSpcl1-3BJb0LwSvNO282wv9wBPkeJk8w-REmTzB5gskTTL6P3x3i0QsbopLL48q_Cn4BufyF8g</recordid><startdate>20190901</startdate><enddate>20190901</enddate><creator>Wu, Huang Ming</creator><creator>Yao, Sun Hui</creator><creator>Su, Yen Liang</creator><creator>Lai, Yu Chen</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>F28</scope><scope>FR3</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PTHSS</scope></search><sort><creationdate>20190901</creationdate><title>Influence of Zr Doping on the Tribological Properties of Amorphous Carbon-Nitride Coating</title><author>Wu, Huang Ming ; 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| subjects | Carbon nitride Coatings Doping Magnetron sputtering Metallic glasses Nanohardness Profilometers Tribology Unbalance Wear X ray photoelectron spectroscopy Zirconium carbide |
| title | Influence of Zr Doping on the Tribological Properties of Amorphous Carbon-Nitride Coating |
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