A MEMS Accelerometer for Sub-mG Sensing

In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors and materials 2019-01, Vol.31 (9), p.2883
Hauptverfasser:	Yamane, Daisuke, Konishi, Toshifumi, Safu, Teruaki, Toshiyoshi, Hiroshi, Sone, Masato, Machida, Katsuyuki, Ito, Hiroyuki, Masu, Kazuya
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceleration Accelerometers Brownian motion Detection Electrical noise Electroplating Gold Microelectromechanical systems Multilayers Sensitivity analysis Serpentine Spring constant
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!