A MEMS Accelerometer for Sub-mG Sensing
In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To in...
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| Veröffentlicht in: | Sensors and materials 2019-01, Vol.31 (9), p.2883 |
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| container_title | Sensors and materials |
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| creator | Yamane, Daisuke Konishi, Toshifumi Safu, Teruaki Toshiyoshi, Hiroshi Sone, Masato Machida, Katsuyuki Ito, Hiroyuki Masu, Kazuya |
| description | In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To increase the proof mass, we propose the use of multiple-layered metal developed by Au electroplating. We then show an approach to design the spring constant for the MEMS accelerometer. A multilayer metal structure is used for serpentine flexures to suspend the high-density proof mass, which also enables us to obtain a high degree of freedom for the spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics are consistent with the design values. The BN of the developed device is experimentally evaluated to be 22 nG/√Hz, which is one or more orders of magnitude lower than those of conventional MEMS accelerometers with the same capacitance sensitivity. The evaluation results confirm that the proposed device has potential for sub-mG sensing. |
| doi_str_mv | 10.18494/SAM.2019.2122 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2298760858</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2298760858</sourcerecordid><originalsourceid>FETCH-LOGICAL-c417t-ecaf9972b474bf679ad1342fbeb0cd2ecaab052a1388213ee7ee9e168cd0c03f3</originalsourceid><addsrcrecordid>eNotkD1PwzAURT2ARFW6MkdiYEp4_khsj1FVClIjhsBs2c4zatUkxW4G_j0pZbrDPbpXOoQ8UCioElo8t3VTMKC6YJSxG7IATUUuNC_vyCqlAwBQVULFqgV5qrNm07RZ7T0eMY49njFmYYxZO7m832YtDmk_fN2T22CPCVf_uSSfL5uP9Wu-e9--retd7gWV5xy9DVpL5oQULlRS245ywYJDB75jc20dlMxSrhSjHFEiaqSV8h144IEvyeN19xTH7wnT2RzGKQ7zpWFMK1mBKtVMFVfKxzGliMGc4r638cdQMH8OzOzAXByYiwP-C2RETp0</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2298760858</pqid></control><display><type>article</type><title>A MEMS Accelerometer for Sub-mG Sensing</title><source>DOAJ Directory of Open Access Journals</source><source>Alma/SFX Local Collection</source><source>EZB Electronic Journals Library</source><creator>Yamane, Daisuke ; Konishi, Toshifumi ; Safu, Teruaki ; Toshiyoshi, Hiroshi ; Sone, Masato ; Machida, Katsuyuki ; Ito, Hiroyuki ; Masu, Kazuya</creator><creatorcontrib>Yamane, Daisuke ; Konishi, Toshifumi ; Safu, Teruaki ; Toshiyoshi, Hiroshi ; Sone, Masato ; Machida, Katsuyuki ; Ito, Hiroyuki ; Masu, Kazuya</creatorcontrib><description>In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To increase the proof mass, we propose the use of multiple-layered metal developed by Au electroplating. We then show an approach to design the spring constant for the MEMS accelerometer. A multilayer metal structure is used for serpentine flexures to suspend the high-density proof mass, which also enables us to obtain a high degree of freedom for the spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics are consistent with the design values. The BN of the developed device is experimentally evaluated to be 22 nG/√Hz, which is one or more orders of magnitude lower than those of conventional MEMS accelerometers with the same capacitance sensitivity. The evaluation results confirm that the proposed device has potential for sub-mG sensing.</description><identifier>ISSN: 0914-4935</identifier><identifier>DOI: 10.18494/SAM.2019.2122</identifier><language>eng</language><publisher>Tokyo: MYU Scientific Publishing Division</publisher><subject>Acceleration ; Accelerometers ; Brownian motion ; Detection ; Electrical noise ; Electroplating ; Gold ; Microelectromechanical systems ; Multilayers ; Sensitivity analysis ; Serpentine ; Spring constant</subject><ispartof>Sensors and materials, 2019-01, Vol.31 (9), p.2883</ispartof><rights>Copyright MYU Scientific Publishing Division 2019</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c417t-ecaf9972b474bf679ad1342fbeb0cd2ecaab052a1388213ee7ee9e168cd0c03f3</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,27903,27904</link.rule.ids></links><search><creatorcontrib>Yamane, Daisuke</creatorcontrib><creatorcontrib>Konishi, Toshifumi</creatorcontrib><creatorcontrib>Safu, Teruaki</creatorcontrib><creatorcontrib>Toshiyoshi, Hiroshi</creatorcontrib><creatorcontrib>Sone, Masato</creatorcontrib><creatorcontrib>Machida, Katsuyuki</creatorcontrib><creatorcontrib>Ito, Hiroyuki</creatorcontrib><creatorcontrib>Masu, Kazuya</creatorcontrib><title>A MEMS Accelerometer for Sub-mG Sensing</title><title>Sensors and materials</title><description>In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To increase the proof mass, we propose the use of multiple-layered metal developed by Au electroplating. We then show an approach to design the spring constant for the MEMS accelerometer. A multilayer metal structure is used for serpentine flexures to suspend the high-density proof mass, which also enables us to obtain a high degree of freedom for the spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics are consistent with the design values. The BN of the developed device is experimentally evaluated to be 22 nG/√Hz, which is one or more orders of magnitude lower than those of conventional MEMS accelerometers with the same capacitance sensitivity. The evaluation results confirm that the proposed device has potential for sub-mG sensing.</description><subject>Acceleration</subject><subject>Accelerometers</subject><subject>Brownian motion</subject><subject>Detection</subject><subject>Electrical noise</subject><subject>Electroplating</subject><subject>Gold</subject><subject>Microelectromechanical systems</subject><subject>Multilayers</subject><subject>Sensitivity analysis</subject><subject>Serpentine</subject><subject>Spring constant</subject><issn>0914-4935</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNotkD1PwzAURT2ARFW6MkdiYEp4_khsj1FVClIjhsBs2c4zatUkxW4G_j0pZbrDPbpXOoQ8UCioElo8t3VTMKC6YJSxG7IATUUuNC_vyCqlAwBQVULFqgV5qrNm07RZ7T0eMY49njFmYYxZO7m832YtDmk_fN2T22CPCVf_uSSfL5uP9Wu-e9--retd7gWV5xy9DVpL5oQULlRS245ywYJDB75jc20dlMxSrhSjHFEiaqSV8h144IEvyeN19xTH7wnT2RzGKQ7zpWFMK1mBKtVMFVfKxzGliMGc4r638cdQMH8OzOzAXByYiwP-C2RETp0</recordid><startdate>20190101</startdate><enddate>20190101</enddate><creator>Yamane, Daisuke</creator><creator>Konishi, Toshifumi</creator><creator>Safu, Teruaki</creator><creator>Toshiyoshi, Hiroshi</creator><creator>Sone, Masato</creator><creator>Machida, Katsuyuki</creator><creator>Ito, Hiroyuki</creator><creator>Masu, Kazuya</creator><general>MYU Scientific Publishing Division</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7TB</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>FR3</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20190101</creationdate><title>A MEMS Accelerometer for Sub-mG Sensing</title><author>Yamane, Daisuke ; Konishi, Toshifumi ; Safu, Teruaki ; Toshiyoshi, Hiroshi ; Sone, Masato ; Machida, Katsuyuki ; Ito, Hiroyuki ; Masu, Kazuya</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c417t-ecaf9972b474bf679ad1342fbeb0cd2ecaab052a1388213ee7ee9e168cd0c03f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>Acceleration</topic><topic>Accelerometers</topic><topic>Brownian motion</topic><topic>Detection</topic><topic>Electrical noise</topic><topic>Electroplating</topic><topic>Gold</topic><topic>Microelectromechanical systems</topic><topic>Multilayers</topic><topic>Sensitivity analysis</topic><topic>Serpentine</topic><topic>Spring constant</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yamane, Daisuke</creatorcontrib><creatorcontrib>Konishi, Toshifumi</creatorcontrib><creatorcontrib>Safu, Teruaki</creatorcontrib><creatorcontrib>Toshiyoshi, Hiroshi</creatorcontrib><creatorcontrib>Sone, Masato</creatorcontrib><creatorcontrib>Machida, Katsuyuki</creatorcontrib><creatorcontrib>Ito, Hiroyuki</creatorcontrib><creatorcontrib>Masu, Kazuya</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Sensors and materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yamane, Daisuke</au><au>Konishi, Toshifumi</au><au>Safu, Teruaki</au><au>Toshiyoshi, Hiroshi</au><au>Sone, Masato</au><au>Machida, Katsuyuki</au><au>Ito, Hiroyuki</au><au>Masu, Kazuya</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A MEMS Accelerometer for Sub-mG Sensing</atitle><jtitle>Sensors and materials</jtitle><date>2019-01-01</date><risdate>2019</risdate><volume>31</volume><issue>9</issue><spage>2883</spage><pages>2883-</pages><issn>0914-4935</issn><abstract>In this paper, we present a highly sensitive micro-electromechanical system (MEMS) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (i.e., Brownian noise, BN) being inversely proportional to a proof mass has to be below 1 µG/√Hz (gravity acceleration G = 9.8 m/s2). To increase the proof mass, we propose the use of multiple-layered metal developed by Au electroplating. We then show an approach to design the spring constant for the MEMS accelerometer. A multilayer metal structure is used for serpentine flexures to suspend the high-density proof mass, which also enables us to obtain a high degree of freedom for the spring constant design without compromising the performance of the MEMS accelerometer. A proof-of-concept device has been fabricated, and the measured characteristics are consistent with the design values. The BN of the developed device is experimentally evaluated to be 22 nG/√Hz, which is one or more orders of magnitude lower than those of conventional MEMS accelerometers with the same capacitance sensitivity. The evaluation results confirm that the proposed device has potential for sub-mG sensing.</abstract><cop>Tokyo</cop><pub>MYU Scientific Publishing Division</pub><doi>10.18494/SAM.2019.2122</doi><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| source | DOAJ Directory of Open Access Journals; Alma/SFX Local Collection; EZB Electronic Journals Library |
| subjects | Acceleration Accelerometers Brownian motion Detection Electrical noise Electroplating Gold Microelectromechanical systems Multilayers Sensitivity analysis Serpentine Spring constant |
| title | A MEMS Accelerometer for Sub-mG Sensing |
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