Dynamics of crosshatch patterns in heteroepitaxy

Regular surface undulations, called cross-hatch patterns, appearing at the free surface of lattice-mismatched heteroepitaxial films are a key signature of plastic relaxation. Here we show that the dynamics of cross-hatch formation is accurately described by a continuum model based on strain-mediated...

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Veröffentlicht in:Physical review. B 2019-08, Vol.100 (8), p.1, Article 085307
Hauptverfasser: Rovaris, Fabrizio, Zoellner, Marvin H., Zaumseil, Peter, Marzegalli, Anna, Di Gaspare, Luciana, De Seta, Monica, Schroeder, Thomas, Storck, Peter, Schwalb, Georg, Capellini, Giovanni, Montalenti, Francesco
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container_issue 8
container_start_page 1
container_title Physical review. B
container_volume 100
creator Rovaris, Fabrizio
Zoellner, Marvin H.
Zaumseil, Peter
Marzegalli, Anna
Di Gaspare, Luciana
De Seta, Monica
Schroeder, Thomas
Storck, Peter
Schwalb, Georg
Capellini, Giovanni
Montalenti, Francesco
description Regular surface undulations, called cross-hatch patterns, appearing at the free surface of lattice-mismatched heteroepitaxial films are a key signature of plastic relaxation. Here we show that the dynamics of cross-hatch formation is accurately described by a continuum model based on strain-mediated surface diffusion, provided that a realistic distribution of dislocations is considered. We demonstrate quantitative agreement between our time-dependent simulations and dedicated atomic force microscopy experiments on Si0.92Ge0.08 films grown on Si(001) at various thicknesses, finally shedding light on the origin and on the dynamical behavior of a widely investigated pattern, first observed more than half a century ago.
doi_str_mv 10.1103/PhysRevB.100.085307
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subjects Atomic force microscopy
Computer simulation
Continuum modeling
Dislocations
Free surfaces
Silicon substrates
Surface diffusion
Time dependent analysis
title Dynamics of crosshatch patterns in heteroepitaxy
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