Synthesis of metal oxide nanowall structures using a carbon nanowall template

We report a synthetic technique for the preparation of -Fe2O3 nanowall (NW) structures using carbon nanowalls (CNWs) as templates. The insertion of Fe atoms inside the CNWs is achieved by the simultaneous sputtering of the Fe target during CNW growth by plasma-enhanced chemical vapor deposition. By...

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Veröffentlicht in:Japanese Journal of Applied Physics 2019-09, Vol.58 (9), p.90912
Hauptverfasser: Akikubo, Kazuma, Kawaguchi, Norihito, Tachibana, Masaru
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creator Akikubo, Kazuma
Kawaguchi, Norihito
Tachibana, Masaru
description We report a synthetic technique for the preparation of -Fe2O3 nanowall (NW) structures using carbon nanowalls (CNWs) as templates. The insertion of Fe atoms inside the CNWs is achieved by the simultaneous sputtering of the Fe target during CNW growth by plasma-enhanced chemical vapor deposition. By annealing of Fe-inserted CNWs at 500 °C-700 °C in air, the C is oxidized and desorbs as CO2, during which the Fe is sintered and NW structures are maintained. Consequently, the desired -Fe2O3 NWs are obtained. SEM observation reveals that the -Fe2O3 NW consisted of nanoparticle chains with diameters of approximately 40 to 50 nm upon increasing the annealing temperature from 500 °C to 700 °C. SiO2 ( -quartz) NWs are also formed using similar processes through the appropriate choice of sputtering target. These results demonstrate the possibility of controlling the composing atom of oxide NW structures using universal processes and conditions.
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The insertion of Fe atoms inside the CNWs is achieved by the simultaneous sputtering of the Fe target during CNW growth by plasma-enhanced chemical vapor deposition. By annealing of Fe-inserted CNWs at 500 °C-700 °C in air, the C is oxidized and desorbs as CO2, during which the Fe is sintered and NW structures are maintained. Consequently, the desired -Fe2O3 NWs are obtained. SEM observation reveals that the -Fe2O3 NW consisted of nanoparticle chains with diameters of approximately 40 to 50 nm upon increasing the annealing temperature from 500 °C to 700 °C. SiO2 ( -quartz) NWs are also formed using similar processes through the appropriate choice of sputtering target. 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subjects Annealing
Carbon
Nanoparticles
Organic chemistry
Plasma enhanced chemical vapor deposition
Silicon dioxide
Sputtering
title Synthesis of metal oxide nanowall structures using a carbon nanowall template
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