Tribological Properties of Diamond-Like Carbon Films in Low and High Moist Air
Diamond-like carbon (DLC) film was deposited on Si wafer by a plasma CVD deposition system using benzene. Tribological properties of the DLC film were evaluated using a ball-on-disk tribo-meter in low (RH 17∼20 %) and high humidity (RH 90∼95 %) conditions in air. The effect of sliding speed (4.2 mm/...
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| Veröffentlicht in: | Tribology letters 2003-02, Vol.14 (2), p.123-130 |
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| creator | Zhang, Wei Tanaka, Akihiro Wazumi, Koichiro Koga, Yoshinori |
| description | Diamond-like carbon (DLC) film was deposited on Si wafer by a plasma CVD deposition system using benzene. Tribological properties of the DLC film were evaluated using a ball-on-disk tribo-meter in low (RH 17∼20 %) and high humidity (RH 90∼95 %) conditions in air. The effect of sliding speed (4.2 mm/s to 25 mm/s) and load (1.06 N to 3.08 N) on friction and wear was investigated. The friction behavior of the DLC film was obviously different in low and high humidity. When tested under low humidity conditions, the friction coefficient decreased significantly with increasing speed, and increased with load. However, under high humidity conditions, the friction coefficient increased with the speed and decreased with increasing load. The wear of the DLC film was little influenced by the sliding speed, normal load and humidity; a level of 10-8 mm3/Nm could be obtained in all tests. The formation of a uniform transfer layer would be the main factor which controlled the friction coefficient of the DLC films. Unlike the friction, the wear resistance of the DLC film is not so easy to discuss and may be affected mainly by the tribo-chemical reaction in all the test conditions. |
| doi_str_mv | 10.1023/A:1021708421353 |
| format | Article |
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Tribological properties of the DLC film were evaluated using a ball-on-disk tribo-meter in low (RH 17∼20 %) and high humidity (RH 90∼95 %) conditions in air. The effect of sliding speed (4.2 mm/s to 25 mm/s) and load (1.06 N to 3.08 N) on friction and wear was investigated. The friction behavior of the DLC film was obviously different in low and high humidity. When tested under low humidity conditions, the friction coefficient decreased significantly with increasing speed, and increased with load. However, under high humidity conditions, the friction coefficient increased with the speed and decreased with increasing load. The wear of the DLC film was little influenced by the sliding speed, normal load and humidity; a level of 10-8 mm3/Nm could be obtained in all tests. The formation of a uniform transfer layer would be the main factor which controlled the friction coefficient of the DLC films. Unlike the friction, the wear resistance of the DLC film is not so easy to discuss and may be affected mainly by the tribo-chemical reaction in all the test conditions.</description><identifier>ISSN: 1023-8883</identifier><identifier>EISSN: 1573-2711</identifier><identifier>DOI: 10.1023/A:1021708421353</identifier><language>eng</language><publisher>Dordrecht: Springer Nature B.V</publisher><subject>Benzene ; Chemical reactions ; Coefficient of friction ; Diamond-like carbon films ; Friction ; Friction resistance ; Humidity ; Organic chemistry ; Sliding ; Tribology ; Wear resistance</subject><ispartof>Tribology letters, 2003-02, Vol.14 (2), p.123-130</ispartof><rights>Tribology Letters is a copyright of Springer, (2003). All Rights Reserved.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c227t-9926aafec30cdc65be0b4ad0f4fc31f0d78daf00a9167b5b477dd09cfbd24c523</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Zhang, Wei</creatorcontrib><creatorcontrib>Tanaka, Akihiro</creatorcontrib><creatorcontrib>Wazumi, Koichiro</creatorcontrib><creatorcontrib>Koga, Yoshinori</creatorcontrib><title>Tribological Properties of Diamond-Like Carbon Films in Low and High Moist Air</title><title>Tribology letters</title><description>Diamond-like carbon (DLC) film was deposited on Si wafer by a plasma CVD deposition system using benzene. Tribological properties of the DLC film were evaluated using a ball-on-disk tribo-meter in low (RH 17∼20 %) and high humidity (RH 90∼95 %) conditions in air. The effect of sliding speed (4.2 mm/s to 25 mm/s) and load (1.06 N to 3.08 N) on friction and wear was investigated. The friction behavior of the DLC film was obviously different in low and high humidity. When tested under low humidity conditions, the friction coefficient decreased significantly with increasing speed, and increased with load. However, under high humidity conditions, the friction coefficient increased with the speed and decreased with increasing load. The wear of the DLC film was little influenced by the sliding speed, normal load and humidity; a level of 10-8 mm3/Nm could be obtained in all tests. The formation of a uniform transfer layer would be the main factor which controlled the friction coefficient of the DLC films. Unlike the friction, the wear resistance of the DLC film is not so easy to discuss and may be affected mainly by the tribo-chemical reaction in all the test conditions.</description><subject>Benzene</subject><subject>Chemical reactions</subject><subject>Coefficient of friction</subject><subject>Diamond-like carbon films</subject><subject>Friction</subject><subject>Friction resistance</subject><subject>Humidity</subject><subject>Organic chemistry</subject><subject>Sliding</subject><subject>Tribology</subject><subject>Wear resistance</subject><issn>1023-8883</issn><issn>1573-2711</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2003</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNotjTtPwzAYRS0EEqUws1piNny249hhiwqlSOExlLnys7ikcbFT8feJBNO5w9E9CF1TuKXA-F17P4FKUBWjXPATNKNCcsIkpafTnhSilOLn6KKUHQAFUGKGXtc5mtSnbbS6x-85HXweoy84BfwQ9T4NjnTxy-OFziYNeBn7fcFxwF36wXpweBW3n_glxTLiNuZLdBZ0X_zVP-foY_m4XqxI9_b0vGg7YhmTI2kaVmsdvOVgna2F8WAq7SBUwXIawEnldADQDa2lEaaS0jlobDCOVVYwPkc3f7-HnL6PvoybXTrmYUpuGFOUS8armv8CIfBP6Q</recordid><startdate>20030201</startdate><enddate>20030201</enddate><creator>Zhang, Wei</creator><creator>Tanaka, Akihiro</creator><creator>Wazumi, Koichiro</creator><creator>Koga, Yoshinori</creator><general>Springer Nature B.V</general><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20030201</creationdate><title>Tribological Properties of Diamond-Like Carbon Films in Low and High Moist Air</title><author>Zhang, Wei ; Tanaka, Akihiro ; Wazumi, Koichiro ; Koga, Yoshinori</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c227t-9926aafec30cdc65be0b4ad0f4fc31f0d78daf00a9167b5b477dd09cfbd24c523</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2003</creationdate><topic>Benzene</topic><topic>Chemical reactions</topic><topic>Coefficient of friction</topic><topic>Diamond-like carbon films</topic><topic>Friction</topic><topic>Friction resistance</topic><topic>Humidity</topic><topic>Organic chemistry</topic><topic>Sliding</topic><topic>Tribology</topic><topic>Wear resistance</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhang, Wei</creatorcontrib><creatorcontrib>Tanaka, Akihiro</creatorcontrib><creatorcontrib>Wazumi, Koichiro</creatorcontrib><creatorcontrib>Koga, Yoshinori</creatorcontrib><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Materials Science Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><jtitle>Tribology letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zhang, Wei</au><au>Tanaka, Akihiro</au><au>Wazumi, Koichiro</au><au>Koga, Yoshinori</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Tribological Properties of Diamond-Like Carbon Films in Low and High Moist Air</atitle><jtitle>Tribology letters</jtitle><date>2003-02-01</date><risdate>2003</risdate><volume>14</volume><issue>2</issue><spage>123</spage><epage>130</epage><pages>123-130</pages><issn>1023-8883</issn><eissn>1573-2711</eissn><abstract>Diamond-like carbon (DLC) film was deposited on Si wafer by a plasma CVD deposition system using benzene. Tribological properties of the DLC film were evaluated using a ball-on-disk tribo-meter in low (RH 17∼20 %) and high humidity (RH 90∼95 %) conditions in air. The effect of sliding speed (4.2 mm/s to 25 mm/s) and load (1.06 N to 3.08 N) on friction and wear was investigated. The friction behavior of the DLC film was obviously different in low and high humidity. When tested under low humidity conditions, the friction coefficient decreased significantly with increasing speed, and increased with load. However, under high humidity conditions, the friction coefficient increased with the speed and decreased with increasing load. The wear of the DLC film was little influenced by the sliding speed, normal load and humidity; a level of 10-8 mm3/Nm could be obtained in all tests. The formation of a uniform transfer layer would be the main factor which controlled the friction coefficient of the DLC films. 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| ispartof | Tribology letters, 2003-02, Vol.14 (2), p.123-130 |
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| language | eng |
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| source | Springer Nature - Complete Springer Journals |
| subjects | Benzene Chemical reactions Coefficient of friction Diamond-like carbon films Friction Friction resistance Humidity Organic chemistry Sliding Tribology Wear resistance |
| title | Tribological Properties of Diamond-Like Carbon Films in Low and High Moist Air |
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