Comparison of low damage sputter deposition techniques to enable the application of very thin a-Si passivation films

Sputtering on passivating layers of silicon solar cells is often reported as a process that can harm the c-Si surface passivation quality. The loss of minority carrier lifetime and decrease in iVoc are related to a “sputter damage” of the passivation layer or more probably to the interface to the si...

Ausführliche Beschreibung