Machining of micro-channels and pyramid patterns using elliptical vibration cutting

Precision machining of micro-channels and quadrangular pyramids was studied using elliptical vibration cutting (EVC). A single crystal diamond tool with the trapezoidal shape was specially developed, and the tool was attached to the orthogonally arranged dual piezoelectric actuators to make the tool...

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Veröffentlicht in:International journal of advanced manufacturing technology 2010-08, Vol.49 (9-12), p.961-968
Hauptverfasser: Kim, Gi Dae, Loh, Byoung Gook
Format: Artikel
Sprache:eng
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