Microbolometer Terahertz Focal Plane Array and Camera with Improved Sensitivity in the Sub-Terahertz Region

A pixel in an uncooled microbolometer terahertz (THz) focal plane array (FPA) has a suspended structure above read-out integrated circuit (ROIC) substrate. An optical cavity structure is formed between a thin metallic layer deposited on the suspended structure and a thick metallic layer deposited on...

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Veröffentlicht in:	Journal of infrared, millimeter and terahertz waves millimeter and terahertz waves, 2015-10, Vol.36 (10), p.947-960
Hauptverfasser:	Oda, Naoki, Kurashina, Seiji, Miyoshi, Masaru, Doi, Kohei, Ishi, Tsutomu, Sudou, Takayuki, Morimoto, Takao, Goto, Hideki, Sasaki, Tokuhito
Format:	Artikel
Sprache:	eng
Schlagworte:	Bolometers Cameras Classical Electrodynamics CMOS Collimation Deformation Electrical Engineering Electronics and Microelectronics Engineering Focal plane devices Instrumentation Integrated circuits Linear polarization Metal oxide semiconductors Metal oxides Pixels Plates (structural members) Substrates Wave plates Wave reflection
Online-Zugang:	Volltext
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