High quality nitride semiconductors grown on novel ScAlMgO4 substrates and their light emitting diodes
III-N semiconductors growth on high quality ScAlMgO4 (SCAMO) substrates was studied. The GaN epitaxial layer grown on the SCAMO substrate showed a low defect density of 5.6 × 107 cm−2 evaluated by cathode luminescence and had a distinct improvement in crystallinity compared to the GaN layer on a sap...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2019-06, Vol.58 (SC), p.SC1041 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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