Study of nano/micro aerosol particles measurement for the UHV slit valves

In response to the nano-scale miniaturization trend of IC devices, advanced semiconductor processes require more stringent cleanliness. This study sets up a UHV measurement system for particles detection within a highly cleanliness testing chamber with a UHV slit valve to be test, and an experimenta...

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Veröffentlicht in:	International journal of computational methods and experimental measurements 2018-01, Vol.6 (3), p.594-604
Hauptverfasser:	Jou, Rong-Yuan, Qiu, Jian-Jia, Chen, Che-Chin, Su, James, Shiao, Ming-Hua
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopes Atomic force microscopy Cleanliness Condensation Energy dispersive X ray spectroscopy Integrated circuits Materials science Miniaturization O ring seals Radiation counters Scanning electron microscopy Surface properties
Online-Zugang:	Volltext
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