Anti-reflection nano-structures fabricated on curved surface of glass lens based on metal contact printing lithography

This paper reports the fabrication of subwavelength nano-structures on the curved surface of a glass lens for the purposes of anti-reflection. It utilizes a flexible PDMS mold to transfer metallic patterns to the lens surface which is pre-coated with a polymer layer. Using the transferred metal patt...

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Veröffentlicht in:	Microelectronic engineering 2019-06, Vol.214, p.15-20
Hauptverfasser:	Su, Wei-Xiang, Wu, Chun-Yin, Lee, Yung-Chun
Format:	Artikel
Sprache:	eng
Schlagworte:	Etching Glass Lenses Metal fabrication Nanostructured materials Optical properties Plasma etching Polydimethylsiloxane Polymers Radius of curvature Silicone resins
Online-Zugang:	Volltext
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