Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS
Strain sensing was demonstrated by utilizing electrically conductive silicon-carbide (β-SiC) fabricated by femtosecond-laser-based direct modification of polydimethylsiloxane (PDMS). Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed differ...
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Veröffentlicht in: | Optical materials express 2019-06, Vol.9 (6), p.2672 |
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creator | Hayashi, Shuichiro Nakajima, Yasutaka Terakawa, Mitsuhiro |
description | Strain sensing was demonstrated by utilizing electrically conductive silicon-carbide (β-SiC) fabricated by femtosecond-laser-based direct modification of polydimethylsiloxane (PDMS). Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed different sensitivity to strain and this difference was discussed by observing the surface morphology at various bending radii using scanning electron microscopy (SEM). The change in electrical conductance at the flat state after repeated bending was also investigated. Furthermore, preliminary demonstration of human motion sensing was performed using the fabricated structures. The presented method will open doors to novel electronic device applications using PDMS. |
doi_str_mv | 10.1364/OME.9.002672 |
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Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed different sensitivity to strain and this difference was discussed by observing the surface morphology at various bending radii using scanning electron microscopy (SEM). The change in electrical conductance at the flat state after repeated bending was also investigated. Furthermore, preliminary demonstration of human motion sensing was performed using the fabricated structures. The presented method will open doors to novel electronic device applications using PDMS.</description><identifier>ISSN: 2159-3930</identifier><identifier>EISSN: 2159-3930</identifier><identifier>DOI: 10.1364/OME.9.002672</identifier><language>eng</language><publisher>Washington: Optical Society of America</publisher><subject>Bend radius ; Detection ; Electrical resistivity ; Human motion ; Human performance ; Laser applications ; Lasers ; Morphology ; Polydimethylsiloxane ; Resistance ; Scanning electron microscopy ; Silicon carbide ; Silicone resins</subject><ispartof>Optical materials express, 2019-06, Vol.9 (6), p.2672</ispartof><rights>Copyright Optical Society of America Jun 1, 2019</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c301t-8c62a2bc3b378ae568462aa4a0c9ae11de79de46a1c5f673013bfc7fea26033b3</citedby><cites>FETCH-LOGICAL-c301t-8c62a2bc3b378ae568462aa4a0c9ae11de79de46a1c5f673013bfc7fea26033b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,860,27903,27904</link.rule.ids></links><search><creatorcontrib>Hayashi, Shuichiro</creatorcontrib><creatorcontrib>Nakajima, Yasutaka</creatorcontrib><creatorcontrib>Terakawa, Mitsuhiro</creatorcontrib><title>Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS</title><title>Optical materials express</title><description>Strain sensing was demonstrated by utilizing electrically conductive silicon-carbide (β-SiC) fabricated by femtosecond-laser-based direct modification of polydimethylsiloxane (PDMS). Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed different sensitivity to strain and this difference was discussed by observing the surface morphology at various bending radii using scanning electron microscopy (SEM). The change in electrical conductance at the flat state after repeated bending was also investigated. Furthermore, preliminary demonstration of human motion sensing was performed using the fabricated structures. The presented method will open doors to novel electronic device applications using PDMS.</description><subject>Bend radius</subject><subject>Detection</subject><subject>Electrical resistivity</subject><subject>Human motion</subject><subject>Human performance</subject><subject>Laser applications</subject><subject>Lasers</subject><subject>Morphology</subject><subject>Polydimethylsiloxane</subject><subject>Resistance</subject><subject>Scanning electron microscopy</subject><subject>Silicon carbide</subject><subject>Silicone resins</subject><issn>2159-3930</issn><issn>2159-3930</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNpNkE9LAzEQxYMoWGpvfoCAV7fm32Z3j1JrFVoqVM8hm53Ilu2mJlmh396s9eAc3jyG38zAQ-iWkjnlUjxsN8t5NSeEyYJdoAmjeZXxipPLf_4azULYk1S5ZCVjE-R30eu2xwH60PafePhV6MBE3xrddSdsXN8MJrbfgEP0yQ0eAra6HoEIDa5P2MIhugAjmnU6gM_qpA0-uKa1I9a6HjuL3542uxt0ZXUXYPbXp-jjefm-eMnW29Xr4nGdGU5ozEojmWa14TUvSg25LEUaaKGJqTRQ2kBRNSCkpia3skg7vLamsKCZJDxtTdHd-e7Ru68BQlR7N_g-vVSMCSFzQolI1P2ZMt6F4MGqo28P2p8UJWoMVqVgVaXOwfIf1kZtIg</recordid><startdate>20190601</startdate><enddate>20190601</enddate><creator>Hayashi, Shuichiro</creator><creator>Nakajima, Yasutaka</creator><creator>Terakawa, Mitsuhiro</creator><general>Optical Society of America</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20190601</creationdate><title>Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS</title><author>Hayashi, Shuichiro ; Nakajima, Yasutaka ; Terakawa, Mitsuhiro</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c301t-8c62a2bc3b378ae568462aa4a0c9ae11de79de46a1c5f673013bfc7fea26033b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>Bend radius</topic><topic>Detection</topic><topic>Electrical resistivity</topic><topic>Human motion</topic><topic>Human performance</topic><topic>Laser applications</topic><topic>Lasers</topic><topic>Morphology</topic><topic>Polydimethylsiloxane</topic><topic>Resistance</topic><topic>Scanning electron microscopy</topic><topic>Silicon carbide</topic><topic>Silicone resins</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hayashi, Shuichiro</creatorcontrib><creatorcontrib>Nakajima, Yasutaka</creatorcontrib><creatorcontrib>Terakawa, Mitsuhiro</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Optical materials express</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hayashi, Shuichiro</au><au>Nakajima, Yasutaka</au><au>Terakawa, Mitsuhiro</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS</atitle><jtitle>Optical materials express</jtitle><date>2019-06-01</date><risdate>2019</risdate><volume>9</volume><issue>6</issue><spage>2672</spage><pages>2672-</pages><issn>2159-3930</issn><eissn>2159-3930</eissn><abstract>Strain sensing was demonstrated by utilizing electrically conductive silicon-carbide (β-SiC) fabricated by femtosecond-laser-based direct modification of polydimethylsiloxane (PDMS). Depending on the laser scanning direction used for the fabrication procedure, the fabricated structures showed different sensitivity to strain and this difference was discussed by observing the surface morphology at various bending radii using scanning electron microscopy (SEM). The change in electrical conductance at the flat state after repeated bending was also investigated. Furthermore, preliminary demonstration of human motion sensing was performed using the fabricated structures. The presented method will open doors to novel electronic device applications using PDMS.</abstract><cop>Washington</cop><pub>Optical Society of America</pub><doi>10.1364/OME.9.002672</doi><oa>free_for_read</oa></addata></record> |
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subjects | Bend radius Detection Electrical resistivity Human motion Human performance Laser applications Lasers Morphology Polydimethylsiloxane Resistance Scanning electron microscopy Silicon carbide Silicone resins |
title | Strain sensing using electrically conductive structures fabricated by femtosecond-laser-based modification of PDMS |
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