Dependence of the Thin Films Porosity On the Deposition Conditions: Results of the Molecular Dynamics Simulation

Dependence of the thin films porosity on substrate temperature and deposition energy is studied using the classical atomistic simulation. It is revealed that pore dimensions increase with the decrease of the energy of deposited atoms. In the case of low-energy deposition up to several percents of cl...

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Veröffentlicht in:	Moscow University physics bulletin 2019-03, Vol.74 (2), p.171-175
Hauptverfasser:	Grigoriev, F. V., Sulimov, V. B., Tikhonravov, A. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Dependence Deposition Energy distribution Mathematical and Computational Physics Molecular dynamics Physics Physics and Astronomy Physics of Condensed State of Matter Porosity Substrates Theoretical Thin films
Online-Zugang:	Volltext
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