AR-Aided Smart Sensing for In-Line Condition Monitoring of IGBT Wafer

This paper describes an augmented reality (AR)-aided smart sensing technique for in-line condition monitoring of insulated-gate bipolar transistor (IGBT) wafers. A series of signal processing algorithms are applied for enabling sensor intelligence. Based on electromagnetic infrared-visible fusion (I...

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Veröffentlicht in:	IEEE transactions on industrial electronics (1982) 2019-10, Vol.66 (10), p.8197-8204
Hauptverfasser:	Li, Kongjing, Tian, Gui Yun, Chen, Xiaotian, Tang, Chaoqing, Luo, Haoze, Li, Wuhua, Gao, Bin, He, Xiangning, Wright, Nick
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Augmented reality Augmented reality (AR) Condition monitoring Detection eddy current pulsed thermography Electromagnetic heating Electromagnetics Electronic devices Electronic materials IGBT Independent component analysis Industrial applications Inspection Insulated gate bipolar transistors Nondestructive testing Sensors Signal processing smart sensing Testing Thermography wafers
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