Study on material removal for nanochannels fabrication using atomic force microscopy tip-based nanomilling approach

In the present study, an atomic force microscopy tip-based nanomilling approach is used to fabricate nanochannels on a poly(methyl methacrylate) surface. A silicon atomic force microscopy tip is employed for all the scratching tests. Results show that the material removal state is obviously differen...

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Veröffentlicht in:Proceedings of the Institution of Mechanical Engineers. Part B, Journal of engineering manufacture Journal of engineering manufacture, 2019-01, Vol.233 (2), p.461-469
Hauptverfasser: Geng, Yanquan, Li, Hao, Yan, Yongda, He, Yang, Zhao, Xuesen
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container_title Proceedings of the Institution of Mechanical Engineers. Part B, Journal of engineering manufacture
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creator Geng, Yanquan
Li, Hao
Yan, Yongda
He, Yang
Zhao, Xuesen
description In the present study, an atomic force microscopy tip-based nanomilling approach is used to fabricate nanochannels on a poly(methyl methacrylate) surface. A silicon atomic force microscopy tip is employed for all the scratching tests. Results show that the material removal state is obviously different from the conventional single scratch process. Chips can be formed during the nanomilling operations and the height of the material pile-up can thus be reduced. The generation of chips may be attributed to the changes of the cutting angle and the feed value during one complete rotation of the scratching process. Moreover, this particular implementation of the atomic force microscopy scratching technique is proved to form nanochannels, following a two-step process during one complete rotation: the first half cycle forms the outer profile and the second half cycle generates the inner profile and increases the machined depth. The scratching trajectories to obtain the outer profile and inner profile are studied in detail. Finally, the change of machined depth in one scratching cycle for the nanomilling process is also investigated. It is anticipated that this method could be employed to fabricate nanochannel used in nanofluidic applications.
doi_str_mv 10.1177/0954405417748188
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subjects Atomic force microscopy
Chip formation
Cutting parameters
Fluidics
Microscopy
Nanochannels
Nanofluids
Polymethyl methacrylate
Rotation
Scratching
title Study on material removal for nanochannels fabrication using atomic force microscopy tip-based nanomilling approach
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