Analysis of Resist Removal Phenomenon Using Laser Irradiation

Resist removal phenomenon with laser irradiation was analyzed by using a finite element (FE) method. Laser irradiation in the water can improve the resist removal effect as compared with that of normal atmosphere irradiation. A two-dimensional (2-D) micro-FE model was constructed based on the bounda...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2017/06/26, Vol.30(3), pp.291-295
Hauptverfasser:	Kamimura, Tomosumi, Kuramae, Hirouki, Yamashiro, Takayuki, Nuno, Kosuke, Umeda, Yuji, Tsujimoto, Singo, Nakamura, Ryosuke, Nishiyama, Takashi, Horibe, Hideo
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysis of resist removal Compressive properties Finite element (FE) method Finite element method Ions Irradiation Laser irradiation Lasers Removal efficiency Stress Two dimensional models
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