Evaluation of strain components in PbTiO3 thin films by micro-raman spectroscopy
We proposed a novel method to evaluate strain components in PbTiO3 thin films using Raman spectroscopy. In this method, the strain components are calculated from peak shifts of three E(TO)-modes. The coefficients to calculate the strain components were decided via least square technique using experi...
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Veröffentlicht in: | Journal of the Ceramic Society of Japan 2018/11/01, Vol.126(11), pp.936-939 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We proposed a novel method to evaluate strain components in PbTiO3 thin films using Raman spectroscopy. In this method, the strain components are calculated from peak shifts of three E(TO)-modes. The coefficients to calculate the strain components were decided via least square technique using experimental values for two-dimensional stress and hydrostatic pressure. The strain components that were estimated using the obtained coefficients were in good agreement with those measured by X-ray diffraction measurement (XRD). The average error between the strain components evaluated by XRD and Raman spectroscopy was about 0.05%. |
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ISSN: | 1882-0743 1348-6535 |
DOI: | 10.2109/jcersj2.18149 |