Time-resolved Analysis of Resist Stripping Phenomenon Using Laser Irradiation

Resist stripping phenomenon with laser irradiation was observed by using a time-resolved analysis. The time change of the resist stripping phenomenon by a probe laser irradiation was observed from the viewpoint of the intensity change of the probe laser. As for the laser irradiation in the water, th...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2018/06/25, Vol.31(3), pp.413-418
Hauptverfasser:	Kamimura, Tomosumi, Umeda, Yuji, Kuramae, Hiroyuki, Nuno, Kosuke, Nakamura, Ryosuke, Horibe, Hideo
Format:	Artikel
Sprache:	eng
Schlagworte:	Compressive properties Compressive stress Electrons Finite element (FE) method Ions Irradiation Lasers Pump laser irradiation Removal efficiency Resist stripping phenomenon Stripping Time-resolved analysis
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