Time-resolved Analysis of Resist Stripping Phenomenon Using Laser Irradiation

Resist stripping phenomenon with laser irradiation was observed by using a time-resolved analysis. The time change of the resist stripping phenomenon by a probe laser irradiation was observed from the viewpoint of the intensity change of the probe laser. As for the laser irradiation in the water, th...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2018/06/25, Vol.31(3), pp.413-418
Hauptverfasser:	Kamimura, Tomosumi, Umeda, Yuji, Kuramae, Hiroyuki, Nuno, Kosuke, Nakamura, Ryosuke, Horibe, Hideo
Format:	Artikel
Sprache:	eng
Schlagworte:	Compressive properties Compressive stress Electrons Finite element (FE) method Ions Irradiation Lasers Pump laser irradiation Removal efficiency Resist stripping phenomenon Stripping Time-resolved analysis
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container_title	Journal of Photopolymer Science and Technology
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creator	Kamimura, Tomosumi Umeda, Yuji Kuramae, Hiroyuki Nuno, Kosuke Nakamura, Ryosuke Horibe, Hideo
description	Resist stripping phenomenon with laser irradiation was observed by using a time-resolved analysis. The time change of the resist stripping phenomenon by a probe laser irradiation was observed from the viewpoint of the intensity change of the probe laser. As for the laser irradiation in the water, the probe laser intensity arrived at the maximum after around 40 μs. During the pump laser irradiation of 8 ns, a large compressive stress of -10 MPa was confirmed inside the resist from the FE analysis results. The generation of this compression stress is important for starting the resist stripping process, and is thought to improve the resist removal efficiency.
doi_str_mv	10.2494/photopolymer.31.413
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Photopol. Sci. Technol.</addtitle><date>2018-06-25</date><risdate>2018</risdate><volume>31</volume><issue>3</issue><spage>413</spage><epage>418</epage><pages>413-418</pages><issn>0914-9244</issn><eissn>1349-6336</eissn><abstract>Resist stripping phenomenon with laser irradiation was observed by using a time-resolved analysis. The time change of the resist stripping phenomenon by a probe laser irradiation was observed from the viewpoint of the intensity change of the probe laser. As for the laser irradiation in the water, the probe laser intensity arrived at the maximum after around 40 μs. During the pump laser irradiation of 8 ns, a large compressive stress of -10 MPa was confirmed inside the resist from the FE analysis results. 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subjects	Compressive properties Compressive stress Electrons Finite element (FE) method Ions Irradiation Lasers Pump laser irradiation Removal efficiency Resist stripping phenomenon Stripping Time-resolved analysis
title	Time-resolved Analysis of Resist Stripping Phenomenon Using Laser Irradiation
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