Fabrication, characterization, and modelling of a novel via-less single metal level magnetic microcoil sensor for biosensing applications

[Display omitted] •First report of via-less planar coil based magnetic sensors fabricated in a single metal level.•The proposed sensors are advantageous over conventional spiral coil based sensors regarding fabrication easiness and heating losses.•Analytical model is developed for the proposed induc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors and actuators. A. Physical. 2019-05, Vol.290, p.190-197
Hauptverfasser:	S, Krishnapriya, Komaragiri, Rama, K.J, Suja
Format:	Artikel
Sprache:	eng
Schlagworte:	Biomolecules Biosensors Coils Comparative studies Detection Differential sensing Finite element analysis Finite element method Induction-balance Limit of detection Magnetic fields Mathematical models Non-spiral planar microcoil Sensitivity Single mask process
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!