P‐64: Mechanism Analysis of Defects on the Organic Film Process
Mechanism of pixel defect and dark‐line defect on the organic film process are studied in this paper, and improvement methods are also given. Reducing outgas by increasing the organic holes can avoid cracking in Org/PVX/ITO laminated structure. Increasing exposure dose can remove ITO residual in fan...
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Veröffentlicht in: | SID International Symposium Digest of technical papers 2019-06, Vol.50 (1), p.1474-1476 |
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Sprache: | eng |
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