Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method
We developed a UV-curable resin (NL-SU1) suitable for screen printing with laser-drilled polyimide masks and reverse-tone nanoimprint lithography. The viscosity of the UV-curable resin composed of two bisphenol A-based monomers was adjusted to 11.0 Pa·s for the screen printing process. It was determ...
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Veröffentlicht in: | Bulletin of the Chemical Society of Japan 2018, Vol.91 (2), p.178-186 |
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