Surface Modification of Corundum Ceramics by Argon Ion Beam

The mechanical properties of near-surface layers of aluminum oxide ceramic treated with a continuous ion beam of argon are investigated. The phase and structural changes of the modified near-surface layers were analyzed by X-ray diffraction analysis and scanning electron microscopy, respectively. Sa...

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Veröffentlicht in:Inorganic materials : applied research 2019, Vol.10 (2), p.438-444
Hauptverfasser: Ghyngazov, S. A., Kostenko, V., Ovchinnikov, V. V., Gushchina, N. V., Makhinko, F. F.
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container_issue 2
container_start_page 438
container_title Inorganic materials : applied research
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creator Ghyngazov, S. A.
Kostenko, V.
Ovchinnikov, V. V.
Gushchina, N. V.
Makhinko, F. F.
description The mechanical properties of near-surface layers of aluminum oxide ceramic treated with a continuous ion beam of argon are investigated. The phase and structural changes of the modified near-surface layers were analyzed by X-ray diffraction analysis and scanning electron microscopy, respectively. Samples for research were made from corundum plates used in microelectronics. Ion processing was carried out using an ILM-1 ion implanter equipped with a Pulsar-1M ion source based on a low-pressure glow discharge with a cold hollow cathode. Argon ions with energy of 30 keV and ion current density j = 300 μA/cm 2 were used for the irradiation. Two irradiation modes with the fluences of 10 16 and 10 17 cm –2 were implemented. It was established that the ion treatment promotes the manifestation of the initial grain structure of a sample and increases the mechanical characteristics (modulus of elasticity and nanohardness) of near-surface layers of samples. According to the X-ray diffraction data, after the action of an ion beam, there is a decrease in the size of the coherent scattering region with respect to the initial state. The irradiation leads to an increase in the values of crystal lattice microstrains. Possible mechanisms of modifying the ceramic surface are discussed.
doi_str_mv 10.1134/S2075113319020199
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subjects Aluminum oxide
Argon
Argon ions
Ceramics
Chemistry
Chemistry and Materials Science
Coherent scattering
Corundum
Crystal lattices
Glow discharges
Grain structure
Hollow cathodes
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Ion beams
Ion current density
Ion currents
Ion sources
Irradiation
Lattice vibration
Low pressure
Materials Science
Mechanical properties
Modulus of elasticity
Nanohardness
New Technologies of Preparation and Treatment of Materials
Phase transitions
Pulsars
Scanning electron microscopy
Surface layers
X-ray diffraction
title Surface Modification of Corundum Ceramics by Argon Ion Beam
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