Measurement Capability of Scanning Microwave Microscopy: Measurement Sensitivity Versus Accuracy

Here, we investigate the measurement capability of a near-field scanning microwave microscope (SMM) using an atomic force microscope with several types of matching circuits for the characterization of high-permittivity dielectric materials. A fixed impedance matching circuit is generally used in SMM...

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Veröffentlicht in:	IEEE transactions on instrumentation and measurement 2019-06, Vol.68 (6), p.1774-1780
Hauptverfasser:	Horibe, Masahiro, Kon, Seitaro, Hirano, Iku
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Atomic force microscopes Atomic force microscopy Circuits Dielectric permittivity Dielectrics Frequency measurement Impedance Impedance matching Impedance measurement interferometric circuit matching circuit measurement uncertainty Microscopes near-field scanning microwave microscopy (SMM) Nonlinear programming Permittivity Permittivity measurement Resistors signal-to-noise ratio
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