Multiple-Beam Scanning Electron Microscopy

* anna-lena.eberle@zeiss.com Introduction When resolving structures at nanometer scale, electron microscopes are the tools of choice. Since the invention of the electron microscope, the technology has matured into a standard technique applied in a wide variety of disciplines and laboratories. To mak...

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Veröffentlicht in:	Microscopy today 2015-03, Vol.23 (2), p.12-19
Hauptverfasser:	Lena Eberle, Anna, Schalek, Richard, Lichtman, Jeff W., Malloy, Matt, Thiel, Brad, Zeidler, Dirk
Format:	Magazinearticle
Sprache:	eng
Schlagworte:	Background noise Defects Dosage Electron microscopes Feature Article Feature recognition Image processing Microscopes Scanning electron microscopy
Online-Zugang:	Volltext
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