Rare Earth Doping Brings Thermal Stability Improvement in Zn0.15Sb0.85 Alloy for Phase Change Memory Application

In this paper, the rare earth (Er or Sm) doped Zn 0.15 Sb 0.85 films were synthesized by magnetron sputtering. The crystallization temperature ( T c ), activation energy ( E a ) and the temperature for ten year data retention ( T ten ) of the thin films were increased significantly by increasing rar...

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