A Novel MEMS Device for Scanning Profile Measurement with Three Cantilever Displacement Sensors

A novel Micro Electro Mechanical System (MEMS) measurement device for straightness measurement with a three point method has been proposed. This device integrates three cantilever displacement sensors with a narrow pitch on a silicon chip. The authors determine appropriates shape, dimensions of the...

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Veröffentlicht in:	Applied mechanics and materials 2017-09, Vol.870, p.237-242
Hauptverfasser:	Shimizu, Hiroki, Baba, Akiyoshi, Yanagihara, Shinya, Akiyoshi, Takahiro, Tamaru, Yuuma
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Design Displacement Etching Gauges Ion implantation Mechanical systems Microelectromechanical systems Profile measurement Rangefinding Sensors Silicon wafers Strain gauges Substrates Temperature compensation Three point method Wiring
Online-Zugang:	Volltext
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